Granted Patent
Utility
US 6,521,550
· Confirmation No. 8167
PROCESS FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE INCLUDING TREATMENT OF GAS USED IN THE PROCESS
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| 2001-10-19 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-10-19 | SPEC |
Specification | 3 | View | |
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| 2001-10-19 | CLM |
Claims | 3 | View | |
| 2001-10-19 | CLM |
Claims | 3 | View | |
| 2001-10-19 | CLM |
Claims | 2 | View | |
| 2001-10-19 | ABST |
Abstract | 1 | View | |
| 2001-10-19 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-10-19 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-10-19 | DRW |
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| 2001-10-19 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-10-19 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-10-19 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-10-19 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-10-19 | DRW |
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| 2001-10-19 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Yoshikazu Tanabe
Iruma-shi, JAPAN
Toshiaki Nagahama
Tokyo, JAPAN
Nobuyoshi Natsuaki
Tokyo, JAPAN
Yasuhiko Nakatsuka
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/795
C23C16/4412
Y02P70/50
H10B12/09
B01D53/8671
B01D2257/108
C30B25/14
Y02C20/30
Prosecution
- Examiner
- ANYA, IGWE U
- Art Unit
- 2825
- Customer No.
- 20457
- Docket No.
- 501.36284CC2
- Confirmation No.
- 8167
Foreign Priority
9-148734
·
1997-06-06
·
JAPAN
Publication
- Pub. No.
- US20020019149A1
- Pub. Date
- 2002-02-14
Patent Term Adjustment
0days
Parent
is a Continuation of
→
App. 09/551,551
· US 6,319,860
Filed 2000-04-18
· Patented Case
Parent
is a Continuation of
→
App. 09/089,398
· US 6,066,508
Filed 1998-06-03
· Patented Case
Child
is a Continuation of
→
App. 10/404,546
· US 6,723,665
Filed 2003-04-02
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation of
→
App. 10/013,729
· US 6,602,808
Filed 2001-12-13
· Patented Case
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED AT REEL: 053654 FRAME: 0254. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Recorded 2021-06-10
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNOR NAME PREVIOUSLY RECORDED ON REEL 052853 FRAME 0153. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT.
Recorded 2021-03-02
ACACIA RESEARCH GROUP LLC,
AMERICAN VEHICULAR SCIENCES LLC,
BONUTTI SKELETAL INNOVATIONS LLC,
CELLULAR COMMUNICATIONS EQUIPMENT LLC,
INNOVATIVE DISPLAY TECHNOLOGIES LLC,
LIFEPORT SCIENCES LLC,
LIMESTONE MEMORY SYSTEMS LLC,
MOBILE ENHANCEMENT SOLUTIONS LLC,
MONARCH NETWORKING SOLUTIONS LLC,
NEXUS DISPLAY TECHNOLOGIES LLC,
PARTHENON UNIFIED MEMORY ARCHITECTURE LLC,
R2 SOLUTIONS LLC,
SAINT LAWRENCE COMMUNICATIONS LLC,
STINGRAY IP SOLUTIONS LLC,
SUPER INTERCONNECT TECHNOLOGIES LLC,
TELECONFERENCE SYSTEMS LLC,
UNIFICATION TECHNOLOGIES LLC
RELEASE OF SECURITY INTEREST IN PATENTS
Recorded 2020-07-08
from
ACACIA RESEARCH GROUP LLC,
AMERICAN VEHICULAR SCIENCES LLC,
BONUTTI SKELETAL INNOVATIONS LLC,
CELLULAR COMMUNICATIONS EQUIPMENT LLC,
INNOVATIVE DISPLAY TECHNOLOGIES LLC,
LIFEPORT SCIENCES LLC,
LIMESTONE MEMORY SYSTEMS LLC,
MERTON ACQUISITION HOLDCO LLC,
MOBILE ENHANCEMENT SOLUTIONS LLC,
MONARCH NETWORKING SOLUTIONS LLC,
NEXUS DISPLAY TECHNOLOGIES LLC,
PARTHENON UNIFIED MEMORY ARCHITECTURE LLC,
R2 SOLUTIONS LLC,
SAINT LAWRENCE COMMUNICATIONS LLC,
STINGRAY IP SOLUTIONS LLC,
SUPER INTERCONNECT TECHNOLOGIES LLC,
TELECONFERENCE SYSTEMS LLC,
UNIFICATION TECHNOLOGIES LLC
PATENT SECURITY AGREEMENT
Recorded 2020-06-05
MERGER
Recorded 2015-04-28
MERGER
Recorded 2015-04-28
MERGER
Recorded 2015-04-28
MERGER
Recorded 2015-04-28
MERGER
Recorded 2015-04-28
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-04-28
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-03-25
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Quick Facts
- Patent No.
- US 6,521,550
- App. No.
- 09/982,173
- Filed
- 2001-10-19
- Granted
- 2003-02-18
- Pub. No.
- US20020019149A1
- Examiner
- ANYA, IGWE U
- Art Unit
- 2825
- PTA
- 0 days
External Links