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App. No. 10/410,803 · Confirmation No. 4352

METHOD FOR ETCHING HIGH DIELECTRIC CONSTANT MATERIALS AND FOR CLEANING DEPOSITION CHAMBERS FOR HIGH DIELECTRIC CONSTANT MATERIALS

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2008-05-30 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2008-05-30 ABN Abandonment 1 View
2008-05-30 ABN Abandonment 1 View
2007-11-21 CTFR Final Rejection 4 View
2007-11-21 1449 List of References cited by applicant and considered by examiner 2 View
2007-11-21 892 List of references cited by examiner 1 View
2007-11-21 FOR Foreign Reference 5 View
2007-11-21 SRFW Search information including classification, databases and other search related notes 1 View
2007-11-19 SRNT Examiner's search strategy and results 2 View
2007-09-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-09-18 CLM Claims 4 View
2007-09-18 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2007-09-18 WFEE Fee Worksheet (SB06) 2 View
2007-09-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-09-18 XT/ Extension of Time 1 View
2007-09-18 WFEE Fee Worksheet (SB06) 1 View
2007-07-02 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2007-07-02 FOR Foreign Reference 17 View
2007-07-02 WFEE Fee Worksheet (SB06) 2 View
2007-07-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-04-19 CTNF Non-Final Rejection 7 View
2007-04-19 892 List of references cited by examiner 1 View
2007-04-19 SRFW Search information including classification, databases and other search related notes 1 View
2006-07-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-07-28 CLM Claims 4 View
2006-07-28 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2006-07-28 WFEE Fee Worksheet (SB06) 1 View
2006-05-31 CTNF Non-Final Rejection 7 View
2006-05-31 892 List of references cited by examiner 1 View
2006-05-31 FOR Foreign Reference 9 View
2006-05-31 FOR Foreign Reference 30 View
2006-05-31 SRFW Search information including classification, databases and other search related notes 1 View
2006-05-29 SRNT Examiner's search strategy and results 4 View
2006-03-20 A.QU Response after Ex Parte Quayle Action 1 View
2006-03-20 CLM Claims 6 View
2006-03-20 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2006-03-20 136A Authorization for Extension of Time all replies 1 View
2006-03-20 WFEE Fee Worksheet (SB06) 1 View
2006-03-08 CTEQ Ex Parte Quayle Action 3 View
2006-03-08 1449 List of References cited by applicant and considered by examiner 1 View
2006-03-08 892 List of references cited by examiner 1 View
2006-03-08 SRFW Search information including classification, databases and other search related notes 1 View
2005-12-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-12-05 CLM Claims 8 View
2005-12-05 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2005-12-05 XT/ Extension of Time 1 View
2005-12-05 WFEE Fee Worksheet (SB06) 2 View
2005-08-15 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2005-08-15 FOR Foreign Reference 1 View
2005-08-15 FOR Foreign Reference 12 View
2005-08-15 FOR Foreign Reference 34 View
2005-08-15 FOR Foreign Reference 22 View
2005-08-15 FOR Foreign Reference 30 View
2005-08-15 FOR Foreign Reference 36 View
2005-06-15 CTNF Non-Final Rejection 9 View
2005-06-15 1449 List of References cited by applicant and considered by examiner 2 View
2005-06-15 892 List of references cited by examiner 1 View
2005-06-15 SRFW Search information including classification, databases and other search related notes 1 View
2005-02-25 ELC. Response to Election / Restriction Filed 1 View
2005-02-25 CLM Claims 6 View
2005-02-25 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-02-25 WFEE Fee Worksheet (SB06) 1 View
2005-01-19 CTRS Requirement for Restriction/Election 4 View
2005-01-19 FWCLM Index of Claims 1 View
2004-11-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-11-04 CLM Claims 8 View
2004-11-04 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-11-04 XT/ Extension of Time 1 View
2004-11-04 WFEE Fee Worksheet (SB06) 1 View
2004-06-11 FOR Foreign Reference 32 View
2004-06-11 FOR Foreign Reference 10 View
2004-06-11 FOR Foreign Reference 34 View
2004-06-11 FOR Foreign Reference 22 View
2004-06-11 FOR Foreign Reference 30 View
2004-06-11 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-06-02 CTNF Non-Final Rejection 15 View
2004-06-02 1449 List of References cited by applicant and considered by examiner 1 View
2004-06-02 892 List of references cited by examiner 1 View
2004-06-02 FWCLM Index of Claims 1 View
2004-06-02 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-19 SRNT Examiner's search strategy and results 1 View
2004-03-15 SRNT Examiner's search strategy and results 2 View
2003-07-14 A.PE Preliminary Amendment 1 View
2003-07-14 SPEC Specification 2 View
2003-07-14 DRW Drawings-only black and white line drawings 8 View
2003-07-14 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-04-10 TRNA Transmittal of New Application 3 View
2003-04-10 SPEC Specification 32 View
2003-04-10 CLM Claims 7 View
2003-04-10 ABST Abstract 1 View
2003-04-10 DRW Drawings-only black and white line drawings 7 View
2003-04-10 OATH Oath or Declaration filed 5 View
2003-04-10 136A Authorization for Extension of Time all replies 3 View
2003-04-10 WFEE Fee Worksheet (SB06) 1 View
2003-04-10 WFEE Fee Worksheet (SB06) 1 View
2003-04-10 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2003-04-10 FOR Foreign Reference 56 View
2003-04-10 FOR Foreign Reference 72 View
2003-04-10 FOR Foreign Reference 44 View
2003-04-10 FOR Foreign Reference 36 View
2003-04-10 FOR Foreign Reference 31 View
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Quick Facts
App. No.
10/410,803
Filed
2003-04-10
Pub. No.
US20040011380A1
Art Unit
1792