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App. No. 10/412,978 · Confirmation No. 3382

WAFERING METHOD COMPRISING A PLASMA ETCH WITH A GAS EMITTING WAFER HOLDER

Inventor: Chih-Yang Li
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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 Code Description Pages PDF
2012-07-05 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-07-05 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-06-21 PA.. Power of Attorney 1 View
2012-06-21 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2012-06-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-05-10 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-03-01 C.AD Change of Address 1 View
2004-02-24 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-02-24 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-24 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-24 FWCLM Index of Claims 1 View
2004-02-24 1449 List of References cited by applicant and considered by examiner 1 View
2003-12-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-12-12 SPEC Specification 1 View
2003-12-12 CLM Claims 2 View
2003-12-12 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-12-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-09-12 CTNF Non-Final Rejection 6 View
2003-09-12 892 List of references cited by examiner 1 View
2003-09-12 1449 List of References cited by applicant and considered by examiner 1 View
2003-09-07 SRNT Examiner's search strategy and results 1 View
2003-04-09 TRNA Transmittal of New Application 1 View
2003-04-09 SPEC Specification 8 View
2003-04-09 CLM Claims 1 View
2003-04-09 ABST Abstract 1 View
2003-04-09 DRW Drawings-only black and white line drawings 5 View
2003-04-09 OATH Oath or Declaration filed 2 View
2003-04-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-04-09 SRFW Search information including classification, databases and other search related notes 1 View
2003-04-09 FWCLM Index of Claims 1 View
2003-04-09 TRNA Transmittal of New Application 1 View
2003-04-09 DRW Drawings-only black and white line drawings 5 View
2003-04-09 SPEC Specification 8 View
2003-04-09 CLM Claims 1 View
2003-04-09 ABST Abstract 1 View
2003-04-09 OATH Oath or Declaration filed 2 View
2003-04-09 WFEE Fee Worksheet (SB06) 1 View
2003-04-09 WFEE Fee Worksheet (SB06) 1 View
2003-04-09 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2003-04-09 FOR Foreign Reference 34 View
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Quick Facts
App. No.
10/412,978
Filed
2003-04-09
Granted
2004-07-06
Art Unit
2824
PTA
0 days