Assembly and method for transferring imprint lithography templates
View Patent ↗Disclosed is a template transfer assembly and method that features a template transfer substrate, and a template having first and second sides, with the first side facing away from the template transfer substrate and the second side facing the template transfer substrate and having mold pattern formed thereon. Polymerized imprint material is disposed between the second side and the template transfer substrate to fixedly attach the template to the template transfer substrate. The method of transferring an imprint lithography template includes dispensing a selected volume of imprinting fluid onto the template transfer substrate, placing the template upon the selected volume; and converting the imprinting fluid to solid imprint material. The selected volume of imprint material is of sufficient quantity to fixedly attach the template to the template transfer substrate while maintaining a space between the mold and the template transfer substrate.
1. A template transfer assembly comprising:
a template transfer substrate;
a template having first and second sides, with said first side facing away from said template transfer substrate and said second side facing said template transfer substrate and having a mold formed thereon; and
polymerized imprint material disposed between said second side and said template transfer substrate to fixedly attach said template to said template transfer substrate.
2. The template transfer assembly as recited in claim 1 wherein said polymerized imprint material surrounds a sub-section of said mold.
3. The template transfer assembly as recited in claim 1 wherein said polymerized imprint material hermetically seals a sub-portion of said mold.
4. The template transfer assembly as recited in claim 1 wherein said polymerized imprint material surrounds said mold.
5. The template transfer assembly as recited in claim 1 wherein said polymerized imprint material encapsulates said mold hermetically sealing said mold from an ambient.
6. The template transfer assembly as recited in claim 1 wherein said template further includes a perimeter groove surrounding said mold with said polymerized imprint material disposed between said template transfer substrate and a region of said second side that is in superimposition with said perimeter groove.
7. The template transfer assembly as recited in claim 1 wherein said template transfer substrate comprises a semiconductor wafer.
8. The template transfer assembly as recited in claim 1 wherein said template transfer substrate includes a semiconductor wafer having an additional template coupled thereto.
9. A template transfer assembly comprising:
a template transfer substrate;
a template having first and second sides, with said first side facing away from said template transfer substrate and said second side facing said template transfer substrate and having a mold pattern formed thereon; and
polymerized imprint material disposed between said second side and said template transfer substrate to fixedly attach said template to said template transfer substrate while maintaining a space between said mold and said template transfer substrate.
10. The template transfer assembly as recited in claim 9 wherein said space is filled with imprint material.
11. The template transfer assembly as recited in claim 9 wherein a sub-portion of said space defines a void between said substrate and a sub-section of said mold.
12. The template transfer assembly as recited in claim 11 wherein said polymerized imprint material surrounds said void.
13. The template transfer assembly as recited in claim 9 wherein said polymerized imprint material hermetically seals a sub-portion of said mold.
14. The template transfer assembly as recited in claim 11 wherein said void is coextensive with said mold.
15. The template transfer assembly as recited in claim 9 wherein said polymerized imprint material encapsulates said mold hermetically sealing said mold from an ambient.
16. A method of transferring an imprint lithography template, said method comprising:
providing a template transfer substrate;
forming a selected volume of imprinting fluid onto said template transfer substrate;
placing said template upon said selected volume; and
converting said imprinting fluid to solid imprint material, with said selected volume being a quantity sufficient to fixedly attach said template to said template transfer substrate while maintaining a space between a mold and said template transfer substrate.
17. The method as recited in claim 16 wherein converting further includes urging said template upon said selected volume so that, upon converting said imprint material, said solid imprint material surrounds a portion of said mold.
18. The method as recited in claim 10 wherein converting further includes urging said template upon said selected volume so that, upon converting said imprint material, said solid imprint material hermetically seals a sub-portion of said mold.
19. The method as recited in claim 10 wherein converting further includes urging said template upon said selected volume so that, upon converting said imprint material, said solid imprint material surrounds said mold, entirely.
20. The method as recited in claim 10 wherein converting further includes urging said template upon said selected volume so that, upon converting said imprint material, said solid imprint material encapsulates said mold, hermetically sealing said mold from an ambient.