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App. No. 10/438,980 · Confirmation No. 5908

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE HAVING TRENCH ELEMENT-ISOLATING STRUCTURE

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Quick Facts
App. No.
10/438,980
Filed
2003-05-16
Granted
2004-11-30
Pub. No.
US20040097046A1
Examiner
NHU, DAVID
Art Unit
2818
PTA
-15 days