Semiconductor device and method of manufacturing the same
View Patent ↗A plurality of semiconductor chips ( 23 ) are bonded to an adhesive layer ( 22 ) formed on a base plate ( 21 ). Then, first to third insulating films ( 31, 35, 39 ), first and second underlying metal layers ( 33, 37 ), first and second re-wirings ( 34, 38 ), and a solder ball ( 41 ) are collectively formed for the plural semiconductor chips ( 23 ). In this case, the first and second underlying metal layers ( 33, 37 ) are formed by a sputtering method, and the first and second re-wirings ( 34, 38 ) are formed by an electroplating method. Then, a laminate structure consisting of the three insulating films ( 39, 35, 31 ), the adhesive layer ( 22 ), and the base plate ( 21 ) is cut in a region positioned between the adjacent semiconductor chips ( 23 ).
1. A semiconductor device comprising:
at least one semiconductor chip having a plurality of connection pads formed on an upper surface thereof;
a lower layer including at least an insulating film of at least one layer formed to cover the upper surface and a peripheral surface of the semiconductor chip; and
re-wirings formed on an upper surface of the insulating film in a manner to be electrically connected to the connection pads, of the semiconductor chip;
each of at least some off the re-wirings including a pad portion arranged in a region of the insulating film, outside the semiconductor chip,
wherein the lower layer has a lower surface opposing the upper surface thereof and is provided with a through-hole positioned outside the lateral extent of the semiconductor chip and extending from the upper surface to the lower surface of the lower layer, an electrode being formed within the through-hole.
2. The semiconductor device according to claim 1 , wherein the electrode is a part of the re-wiring.
3. The semiconductor device according to claim 1 , wherein a columnar electrode is formed on a portion of one of the re-wirings proximate to where the electrode is formed in the through-hole.
4. The semiconductor device according to claim 1 , wherein the lower layer is provided with throughholes corresponding to some of the lower re-wirings, electrodes which are connected to the lower re-wirings being formed in the through-holes, and columnar electrodes being formed on at least some of the remaining re-wirings.
5. A semiconductor device according to claim 4 , wherein the insulating film includes an upper layer covering the periphery of the columnar electrode and a lower layer formed under the upper layer.
6. The semiconductor device according to claim 1 , further comprising an electrode that is not electrically connected to the connection pad.
7. The semiconductor device according to claim 1 , further comprising at least one electronic part provided with a connection terminal and a connecting member for electrically connecting the electrode formed within the through-hole to the connection terminal of the electronic part.
8. The semiconductor device according to claim 7 , wherein the electronic part comprises at least one another semiconductor chip having a connection pad formed on an upper surface thereof, an insulating film having at least one layer formed in a manner to cover one surface and a periphery of the another semiconductor chip, a re-wiring formed on an upper surface of the insulating film so as to be connected to the connection pad of the another semiconductor chip, and an electrode formed on the re-wiring.
9. The semiconductor device according to claim 8 , wherein the electrode of the at least one electric part is a columnar electrode.
10. The semiconductor device according to claim 8 , wherein the lower layer of the at least one electric part is provided with a through-hole, and the electrode of the at least one electric part is formed within the through-hole.
11. The semiconductor device according to claim 10 , wherein a columnar electrode protruding in a direction opposite to a protruding direction of the electrode of the at least one electric part is formed on the electrode.
12. A semiconductor device according to claim 1 , wherein the semiconductor chip has a lower surface facing the upper surface, and the lower surface of the insulating film is substantially flush with the lower surface of the semiconductor chip.
13. A semiconductor device according to claim 1 , wherein the re-wiring is electrically connected to the electrode, and a columnar electrode is formed on the pad portion of the re-wiring.