Hafnium silicide target and manufacturing method for preparation thereof
View Patent ↗Provided is a hafnium silicide target for forming a gate oxide film composed of HfSi 0.82-0.98 , wherein the oxygen content is 500 to 10000 ppm. Manufactured is a hafnium silicide target for forming a gate oxide film, wherein powder of the composition composed of HfSi 0.82-0.98 is synthesized, pulverized to be 100 mesh or less, and thereafter subject to hot pressing or hot isostatic pressing (HIP) at 1700° C. to 2120° C. and 150 to 2000 kgf/cm 2 . Thereby obtained is a hafnium silicide target, and the manufacturing method thereof, suitable for forming a HfSiO film and HfSiON film that may be used as a high dielectric gate insulation film, superior in embrittlement resistance, having a low generation of particles, and which is not likely to cause ignition of sintering powder or explosion of powder dust during the manufacturing process thereof.
1. A method of manufacturing a hafnium silicide target for forming a gate oxide film, comprising the steps of: synthesizing a powder of a composition composed of HfSi 0.82-0.98 pulverizing said powder to be 100 mesh or less, and after said pulverizing and synthesizing steps, subjecting said powder to hot pressing or hot isostatic pressing (HIP) at 1700° C. to 2120° C. and 150 to 2000 kgf/cm 2 .
2. A hafnium silicide target for forming a gate oxide film, said hafnium silicide target being composed of HfSi 0.82-0.98 having an oxygen content of 500 to 10000 ppm, and being manufactured by a process in which a powder of a composition composed of HfSi 0.82-0.98 is synthesized, pulverized to be 100 mesh or less, and thereafter is subjected to hot pressing or hot isostatic pressing (HIP) at 1700° C. to 2120° C. and 150 to 2000 kgf/cm 2 .
3. A hafnium silicide target far forming a gate oxide film according to claim 2 , wherein said hafnium silicide target has a zirconium content of 2.5 wt % or less.
4. A hafnium silicide target for forming a gate oxide film according to claim 2 , wherein impurities of said hafnium silicide target include C: 300 ppm or less, Ti: 100 ppm or less, Mo: 100 ppm or less, W: 10 ppm or less, Nb: 10 ppm or less, Fe: 10 ppm or less, Ni: 10 ppm or less, Cr: 10 ppm or less, Na: 0.1 ppm or less, K: 0.1 ppm or less, U: 0.01 ppm or less, and Th: 0.01 ppm or less.
5. A hafnium silicide target for forming a gate oxide film according to claim 2 , wherein said hafnium silicide target has an average grain size of 5 to 200 μm.
6. A hafnium silicide target for forming a gaze oxide film according to claim 2 , wherein said hafnium silicide target has a relative density of 95% or more.
7. A hafnium silicide target for forming a gate oxide film according to claim 6 , wherein said hafnium silicide target has a zirconium content of 2.5 wt % or less.
8. A hafnium silicide target for forming a gate oxide film according to claim 7 , wherein impurities of said hafnium silicide target include C: 300 ppm or less, Ti: 100 ppm or less, Mo: 100 ppm or less, W: 10 ppm or less, Nb: 10 ppm or less, Fe: 10 ppm or less, Ni: 10 ppm or less, Cr: 10 ppm or less, Na: 0.1 ppm or less, K: 0.1 ppm or less, U: 0.01 ppm or less, and Th: 0.01 ppm or less.
9. A hafnium silicide target for forming a gate oxide film according to claim 8 , wherein said hafnium silicide target has an average grain size of 5 to 200 μm.