Sputtering target containing zinc sulfide as major component, optical recording medium on which phase change optical disk protective film containing zinc sulfide as major component is formed by using the target, and method for manufacturing the sputtering target
View Patent ↗Provided is a sputtering target and an optical recording medium having formed thereon a phase change optical disc protective film having zinc sulfide as its principal component employing such a target, as well as the manufacturing method thereof, characterized in that the sputtering target has zinc sulfide as its principal component, and is capable of adjusting the refractive index of a film containing conductive oxide in the range of 2.0 to 2.6. This sputtering target, and an optical recording medium having formed thereon a phase change optical disc protective film having zinc sulfide as its principal component employing such a target, is capable of reducing particles (dust emission) and nodules that arise during sputtering, has minimal variation in quality and is capable of improving mass productiveness, and in which the crystal grain is fine and has a high density of 90% or more.
1. A sputtering target for use in forming a phase change optical disc protective film of an optical recording medium, comprising:
a sputtering target having zinc sulfide as its principal component, 1 to 50 mol % of at least one conductive oxide selected from a group consisting of indium oxide, tin oxide, and zinc oxide, and at least one additional oxide selected from a group consisting of aluminum oxide, gallium oxide, zirconium oxide, germanium oxide, stibium oxide, and niobium oxide,
wherein said sputtering target is adapted for use in forming a film having zinc sulfide as its principal component and a refractive index in a range of 2.0 to 2.6.
2. A sputtering target according to claim 1 , wherein said at least one additional oxide contained in said target is contained relative to said conductive oxide at a weight ratio conversion of 0.01 to 20%.
3. A sputtering target according to claim 2 , wherein said target has one of an insulation phase and a high resistance phase existing therein that contains zinc sulfide.
4. A sputtering target according to claim 2 , wherein said sputtering target has a relative density of at least 90%.
5. A sputtering target according to claim 2 , wherein said sputtering target has a bulk resistance of 1 Ωcm or less.
6. A sputtering target according to claim 2 , wherein said target has one of an insulation phase and a high resistance phase existing therein with an average crystal grain size of 5 μm or less.
7. A sputtering target according to claim 6 , wherein said one of said insulation phase and said high resistance phase contains zinc sulfide.
8. A sputtering target according to claim 7 , wherein said sputtering target has a relative density of at least 90%.
9. A sputtering target according to claim 8 , wherein said sputtering target has a bulk resistance of 1 Ωcm or less.
10. A sputtering target according to claim 1 , wherein said target has one of an insulation phase and a high resistance phase existing therein with an average crystal grain size of 5 μm or less.
11. A sputtering target according to claim 10 , wherein said one of said insulation phase and said high resistance phase contains zinc sulfide.
12. A sputtering target according to claim 11 , wherein said sputtering target has a relative density of at least 90%.
13. A sputtering target according to claim 12 , wherein said sputtering target has a bulk resistance of 1 Ωcm or less.
14. A sputtering target according to claim 1 , wherein said target has one of an insulation phase and a high resistance phase existing therein that contains zinc sulfide.
15. A sputtering target according to claim 1 , wherein said sputtering target has a relative density of at least 90%.
16. A sputtering target according to claim 1 , wherein said sputtering target has a bulk resistance of 1 Ωcm or less.
17. An optical recording medium having a phase change optical disc protective film formed thereon, said film having zinc sulfide as its principal component and a refractive index in a range of 2.0 to 2.6, said film being a sputtered film formed by a sputtering target having zinc sulfide as its principal component, 1 to 50 mol % of at least one conductive oxide selected from a group consisting of indium oxide, tin oxide, and zinc oxide, and at least one additional oxide selected from a group consisting of aluminum oxide, gallium oxide, zirconium oxide, germanium oxide, stibium oxide, and niobium oxide.
18. A method of manufacturing a sputtering target, comprising the steps of:
evenly mixing respective component raw material powders;
heating the mixed powders to a temperature of 700 to 1200° C. by one of hot pressing and hot isostatic pressing; and
sintering the mixed powders under a bearing of 100 to 300 kg/cm 2 , such that the sputtering target produced has zinc sulfide as its principal component, 1 to 50 mol % of at least one conductive oxide selected from a group consisting of indium oxide, tin oxide, and zinc oxide, and at least one additional oxide selected from a group consisting of aluminum oxide, gallium oxide, zirconium oxide, germanium oxide, stibium oxide, and niobium oxide.
19. A method according to claim 18 , wherein said at least one additional oxide contained in said target is contained relative to said conductive oxide at a weight ratio conversion of 0.01 to 20%.