IP Library Granted Patent US 7,543,596
Granted Patent B2
US 7,543,596 · App. 10/520,635 · Granted Jun 9, 2009

Liquid flow controller and precision dispense apparatus and system

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Quick Facts
Patent No.
US 7,543,596
App. No.
10/520,635
Granted
Jun 9, 2009
Kind
B2
Abstract

Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.

Claims (15)

1. Fluid flow control apparatus, comprising: a proportional fluid control valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with said proportional fluid control valve for modulating said proportional fluid control valve; means for measuring pressure drop; a controller in communication with said pressure drop measuring means and with said pneumatic proportional control valve for controlling the flow of fluid through said proportional fluid control valve in response to said measured pressure drop; said apparatus configured to interchangeably contain one of a plurality of frictional flow elements having a frictional flow element fluid inlet in fluid communication with said fluid outlet of said proportional fluid control valve and having a frictional flow element fluid outlet spaced from said frictional flow element fluid inlet, each of said frictional flow elements comprising a helical coil having a unique length or diameter relative to any other of said plurality of frictional flow elements and creating a pressure drop between said frictional flow element fluid inlet and frictional flow element fluid outlet that is measured by said means for measuring pressure drop.

2. The fluid flow control apparatus of claim 1 , further comprising means for sensing temperature of said fluid, and wherein said controller compares said sensed temperature to a predetermined temperature and controls said pneumatic proportional control valve in response to said comparison.

3. The fluid control apparatus of claim 1 , wherein said means for measuring said pressure drop comprises a first pressure sensor for sensing pressure of said fluid at said fluid outlet of said proportional fluid control valve and a second pressure sensor for sensing pressure of said fluid at said frictional flow element fluid outlet.

4. The fluid control apparatus of claim 3 , wherein said first pressure sensor is contained in a housing integral with said proportional fluid control valve.

5. The fluid control apparatus of claim 1 , further comprising a suckback valve in pneumatic communication with said pneumatic proportional control valve.

6. The fluid control apparatus of claim 1 , wherein said pneumatic proportional control valve is a solenoid.

7. The fluid control apparatus of claim 1 , wherein said frictional flow element fluid inlet is in fluid communication with said fluid outlet of said proportional fluid control valve such that all of the fluid flowing from said fluid outlet of said valve must enter said fluid inlet of said frictional flow element.

8. A method of controlling the dispense of fluid from a dispenser to a point of use, comprising: providing a proportional fluid control valve having a first fluid inlet and a first fluid outlet; determining the flow characteristics of said fluid; providing an interchangeable frictional flow element in fluid communication with said first fluid outlet, said frictional flow element comprising a helical coil having a length and diameter chosen based upon said flow characteristics to create a pressure drop across said element; sensing said pressure drop across said frictional flow element; and modulating said proportional fluid control valve in response to said sensed pressure drop.

9. The method of claim 8 , wherein a pneumatic proportional control valve is provided to modulate said proportional fluid control valve pneumatically.

10. The method of claim 9 , further comprising providing a controller responsive to said measured pressure drop for controlling said pneumatic proportional control valve.

11. The method of claim 8 , further comprising means for regulating the fluid pressure of said fluid entering said first fluid inlet.

12. A method of controlling the dispense of fluid from a dispenser to a point of use, comprising: providing a proportional fluid control valve having a first fluid inlet and a first fluid outlet; providing a frictional flow element in fluid communication with said first fluid outlet, said frictional flow element creating a pressure drop; sensing said pressure drop across said frictional flow element; and modulating said proportional fluid control valve in response to said sensed pressure drop, wherein a pneumatic proportional control valve is provided to modulate said proportional fluid control valve pneumatically, and further comprising holding the pneumatic proportional control valve open to allow a minimum level of purge gas to bleed from the pneumatic proportional control valve.

13. The method of claim 12 , wherein said frictional flow element comprises a helical coil.

14. A method of controlling the dispense of fluid from a dispenser to a point of use, comprising: providing a proportional fluid control valve having a first fluid inlet and a first fluid outlet; providing a frictional flow element in fluid communication with said first fluid outlet, said frictional flow element creating a pressure drop; sensing said pressure drop across said frictional flow element; and modulating said proportional fluid control valve in response to said sensed pressure drop, wherein a pneumatic proportional control valve is provided to modulate said proportional fluid control valve pneumatically, and wherein there are a plurality of fluid control valves, and wherein said pneumatic proportional control valve is held open at a set level such that the pneumatic pressure supplied to each said fluid control valve offsets differences among said plurality of fluid control valves allowing each said fluid control valve to open in the same amount of time and/or with the same pressure.

15. The method of claim 14 , wherein said frictional flow element comprises a helical coil.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0032 →
RELEASE OF SECURITY INTEREST Recorded Nov 8, 2018
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ATMI PACKAGING, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 047477/0151 →
SECURITY INTEREST Recorded May 2, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032812/0192 →
SECURITY INTEREST Recorded May 1, 2014
From: ENTEGRIS, INC.; POCO GRAPHITE, INC.; ATMI, INC.; ADVANCED TECHNOLOGY MATERIALS, INC.; ATMI PACKAGING, INC.
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 032815/0852 →
RELEASE OF SECURITY INTEREST Recorded Aug 17, 2011
From: WELLS FARGO BANK NATIONAL ASSOCIATION
To: ENTEGRIS, INC.
Reel/Frame 026764/0880 →
SECURITY AGREEMENT Recorded Mar 9, 2009
From: ENTEGRIS, INC.
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS AGENT
Reel/Frame 022354/0784 →
MERGER Recorded Jul 28, 2006
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 018026/0873 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 21, 2005
From: MCLOUGHLIN, ROBERT F.; GONNELLA, GEORGE; GASHGAEE, IRAJ; LAVERDIERE, MARC; MARRS, JENNIFER
To: MYKROLIS CORPORATION
Reel/Frame 016378/0755 →