High-purity Ni-V alloy target therefrom high-purity Ni-V alloy thin film and process for producing high-purity Ni-V alloy
View Patent ↗Provided are a high purity Ni—V alloy, high purity Ni—V alloy target and high purity Ni—V alloy thin film wherein the purity of the Ni—V alloy excluding Ni, V and gas components is 99.9 wt % or higher, and the V content variation among ingots, targets or thin films is within 0.4%. With these high purity Ni—V alloy, high purity Ni—V alloy target and high purity Ni—V alloy thin film having a purity of 99.9 wt % or higher, the variation among ingots, targets or thin films is small, the etching property is improved, and isotopic elements such as U and Th that emit alpha particles having an adverse effect on microcircuits in a semiconductor device are reduced rigorously. And further provided is a manufacturing method of such high purity Ni—V alloy capable of effectively reducing the foregoing impurities.
1. A high purity nickel-vanadium alloy sputtering target for depositing thin films forming microcircuits of semiconductor devices, comprising:
a sputtering target body consisting of a non-magnetic Ni—V alloy having 7.2 wt % V that provides stable etching characteristics and that suppresses alpha emissions, said sputtering target body not including Ni 8 V intermetallic compound and having a structure formed by forging and rolling;
said Ni—V alloy having a purity, excluding gas components, of at least 99.995 wt %, a variation of V content within 0.4%, an impurity content of 10 ppm or less of each of Cr, Al and Mg, and an impurity content of 1 ppb or less of each of U and Th.
2. A high purity nickel-vanadium alloy sputtering target according to claim 1 , wherein said Ni—V alloy has an impurity content of Pb of less than 0.1 ppm and an impurity content of Bi of less than 0.1 ppm.
3. A high purity nickel-vanadium alloy sputtering target according to claim 2 , wherein said Ni—V alloy has an impurity content of N of 1 to 100 wtppm.
4. A high purity nickel-vanadium alloy sputtering target according to claim 1 , wherein said Ni—V alloy consists of said 7.2 wt % V, impurities, and a remainder of Ni.
5. A high purity nickel-vanadium alloy sputtering target according to claim 4 , wherein said sputtering target body is of a size of φ320×6 mmt.
6. A high purity nickel-vanadium alloy thin film deposited from a sputtering target onto a substrate, comprising:
a thin film forming part of a microcircuit of a semiconductor device, said thin film consisting of a non-magnetic Ni—V alloy having 7.2 wt % V that provides stable etching characteristics, that suppresses alpha emissions, and that does not contain Ni 8 V intermetallic compound;
said Ni—-V alloy having a purity, excluding gas components, of at least 99.995 wt %, a variation of V content within 0.4%, a content of 10 ppm or less of each of Cr, Al and Mg, and a content of 1 ppb or less of each of U and Th.
7. A high purity nickel-vanadium alloy thin film according to claim 6 , wherein said Ni—-V alloy has a content of Pb of less than 0.1 ppm and a content of Bi of less than 0.1 ppm.
8. A high purity nickel-vanadium alloy thin film according to claim 7 , wherein said Ni—V alloy has a content of N of 1 to 100 wtppm.
9. A high purity nickel-vanadium alloy thin film according to claim 6 , wherein said thin film consists of said 7.2 wt % V, impurities, and a remainder of Ni.
10. A high purity nickel-vanadium alloy sputtering target for depositing thin films forming microcircuits of semiconductor devices, comprising:
a sputtering target body consisting of a Ni—V alloy that provides stable etching characteristics and that suppresses alpha emissions, said sputtering target body having a structure formed by forging and rolling;
said Ni—V alloy having a purity, excluding gas components, of at least 99.995 wt %, a variation of V content within 0.4%, an impurity content of 10 ppm or less of each of Cr, Al and Mg, and an impurity content of 1 ppb or less of each of U and Th.