Fuse structure having reduced heat dissipation towards the substrate
View Patent ↗A fuse structure ( 100 ) suitable for incorporation in an integrated circuit presents a reduced thermal conduction footprint to the substrate ( 103 ). A patterned material stack ( 102 ) is formed on a substrate ( 103 ) and at least a portion of a material disposed between the substrate ( 103 ) and an upper portion of the fuse structure ( 100 ) is selectively etched so as to reduce the thermal conduction pathway between the upper portion and the substrate ( 103 ). In a further aspect of the present invention, the reduced cross-section of the fuse structure ( 100 ) has an increased current density resulting in a lower amount of current being needed to program the fuse.
1. A method of manufacturing a fuse structure, comprising:
providing an electrically insulating substrate;
forming a first blanket layer of a first material over the substrate;
forming a second blanket layer of a second material over the first blanket layer;
patterning the second and first layers to form a first patterned structure;
forming a passivation layer over the first patterned structure;
etching an opening in the passivation layer such that a portion of the first patterned structure is exposed; and
isotropically etching at least a portion of the first material within the opening in the passivation layer.
2. The method of claim 1 , wherein the electrically insulating substrate comprises an inter-layer dielectric.
3. The method of claim 2 , wherein forming a first blanket layer of a first material comprises depositing tungsten over the inter-layer dielectric.
4. The method of claim 3 , wherein forming a second blanket layer of a second material comprises depositing aluminum.
5. The method of claim 4 , further comprising forming a plurality of bonding pads; etching a plurality of openings in the passivation layer such that each of the plurality of openings is formed over a corresponding one of the bonding pads, and each opening is overlapped by the corresponding bonding pad.
6. A method of forming a fuse structure comprising: forming a patterned material stack with at least one lower layer of the stack being selectively etchable with respect to at least one upper layer of the stack and subsequently selectively etching at least a portion of the at least one lower layer, the method further comprising forming a passivation layer over the material stack and forming an opening in the passivation layer prior to selectively etching at least a portion of the at least one lower layer, wherein the lower layer comprises at least one of polysilicon, amorphous silicon, and tungsten.
7. The method of claim 6 , wherein the lower layer comprises a material selected from the group consisting of polysilicon and amorphous silicon; and the upper layer comprises a metal silicide.
8. The method of claim 6 , wherein the lower layer comprises tungsten and the upper layer comprises aluminum.
9. A method of manufacturing a fuse structure comprising:
providing an electrically insulating substrate;
forming a first blanket layer of a first material over the substrate;
forming a second blanket layer of a second material over the first blanket layer;
patterning the second and first layers to form a first patterned structure; and
subsequent to patterning the second and first layers, selectively etching at least a portion of the first material; wherein the first material is polysilicon and the second material is a metal.
10. The method of claim 9 , further comprising, prior to selectively etching at least a portion of the first material, forming a passivation layer over the patterned structure; and etching an opening in the passivation layer such that a portion of the patterned structure is exposed.
11. The method of claim 10 , further comprising forming a plurality of bonding pads; etching a plurality of openings in the passivation layer such that each of the plurality of openings is formed over a corresponding one of the bonding pads, and each opening is overlapped by the corresponding bonding pad.