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App. No. 10/667,387 · Confirmation No. 9380

ILLUMINATION SYSTEM WITH SPATIALLY CONTROLLABLE PARTIAL COHERENCE COMPENSATION FOR LINE WIDTH VARIANCES IN A PHOTOLITHOGRAPHIC SYSTEM

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2005-09-01 COCOUT Certificate of Correction - Post Issue Communication 1 View
2005-07-22 COCIN Request for Certificate of Correction 5 View
2004-09-23 IFEE Issue Fee Payment (PTO-85B) 4 View
2004-06-29 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-29 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-29 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-29 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-28 WFEE Fee Worksheet (SB06) 1 View
2004-04-28 FWCLM Index of Claims 1 View
2004-04-28 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2004-04-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-04-15 SPEC Specification 1 View
2004-04-15 CLM Claims 6 View
2004-04-15 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-04-15 PA.. Power of Attorney 3 View
2004-04-15 DIST Terminal Disclaimer 1 View
2004-04-15 LET. Miscellaneous Incoming Letter 3 View
2004-04-08 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2004-01-15 CTNF Non-Final Rejection 6 View
2004-01-15 1449 List of References cited by applicant and considered by examiner 2 View
2004-01-15 892 List of references cited by examiner 1 View
2004-01-15 SRFW Search information including classification, databases and other search related notes 1 View
2004-01-08 A.PE Preliminary Amendment 2 View
2004-01-08 SPEC Specification 2 View
2004-01-08 CLM Claims 6 View
2004-01-08 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-01-08 M852 Letter to Official Draftsman Filed P/E 1 View
2004-01-08 DRW Drawings-only black and white line drawings 4 View
2004-01-08 SRNT Examiner's search strategy and results 1 View
2003-09-23 TRNA Transmittal of New Application 4 View
2003-09-23 SPEC Specification 18 View
2003-09-23 CLM Claims 7 View
2003-09-23 ABST Abstract 1 View
2003-09-23 DRW Drawings-only black and white line drawings 8 View
2003-09-23 OATH Oath or Declaration filed 3 View
2003-09-23 ADS Application Data Sheet 2 View
2003-09-23 IDS Information Disclosure Statement (IDS) Form (SB08) 7 View
2003-09-23 FOR Foreign Reference 62 View
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2003-09-23 FOR Foreign Reference 13 View
2003-09-23 FOR Foreign Reference 7 View
2003-09-23 WFEE Fee Worksheet (SB06) 1 View
2003-09-23 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/667,387
Filed
2003-09-23
Granted
2004-11-23
Pub. No.
US20040057033A1
Art Unit
2851
PTA
0 days