Granted Patent
Utility
US 6,809,827
· Confirmation No. 4548
SELF REFERENCING MARK INDEPENDENT ALIGNMENT SENSOR
Inventor:
Justin L. Kreuzer
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-09-17 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2004-09-17 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2004-06-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-18 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2004-06-18 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-06-18 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-06-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-06-18 | FWCLM |
Index of Claims | 1 | View | |
| 2004-06-14 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-09-25 | TRNA |
Transmittal of New Application | 5 | View | |
| 2003-09-25 | SPEC |
Specification | 21 | View | |
| 2003-09-25 | CLM |
Claims | 2 | View | |
| 2003-09-25 | ABST |
Abstract | 1 | View | |
| 2003-09-25 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2003-09-25 | OATH |
Oath or Declaration filed | 1 | View | |
| 2003-09-25 | ADS |
Application Data Sheet | 1 | View | |
| 2003-09-25 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 6 | View | |
| 2003-09-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-09-25 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Justin L. Kreuzer
Trumbull, CT
Attorneys & Agents of Record
Classification
USPC
356/508
G03F7/70358
G03F9/7088
G03F9/7049
G03F9/7076
Prosecution
- Examiner
- KIM, RICHARD H
- Art Unit
- 2871
- Customer No.
- 26111
- Docket No.
- 1857.1530001
- Confirmation No.
- 4548
Publication
- Pub. No.
- US20040066518A1
- Pub. Date
- 2004-04-08
Patent Term Adjustment
0days
from
SVG LITHOGRAPHY SYSTEMS, INC.,
ASML US, INC.,
ASM LITHOGRAPHY, INC. AND ASML US, LLC,
ASML US, INC.
CERTIFICATE OF OWNERSHIP AND MERGER, CONVERSION, MERGER, AND CONFIRMATORY ASSIGNMENT
Recorded 2004-04-08
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Quick Facts
- Patent No.
- US 6,809,827
- App. No.
- 10/670,028
- Filed
- 2003-09-25
- Granted
- 2004-10-26
- Pub. No.
- US20040066518A1
- Examiner
- KIM, RICHARD H
- Art Unit
- 2871
- PTA
- 0 days
External Links