IP Library › Granted Patent US 6,807,503
Granted Patent Utility
US 6,807,503 · Confirmation No. 9286

METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION

Inventors: Jun Ye, Xun Chen
Patented Case View Patent ↗ View Publication ↗
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2007-04-19 LET. Miscellaneous Incoming Letter 1 View
2004-07-19 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-07-19 LET. Miscellaneous Incoming Letter 4 View
2004-07-08 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-08 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-08 1449 List of References cited by applicant and considered by examiner 1 View
2004-07-08 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-07-08 FWCLM Index of Claims 1 View
2004-07-08 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-06 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-06-06 CLM Claims 10 View
2004-06-06 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-05-27 WFEE Fee Worksheet (SB06) 1 View
2004-05-27 FWCLM Index of Claims 1 View
2004-05-25 SRNT Examiner's search strategy and results 1 View
2004-05-24 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-05-21 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-05-21 ARTIFACT Artifact sheet indicating an item has been filed which cannot be scanned 1 View
2004-05-19 LET. Miscellaneous Incoming Letter 2 View
2004-05-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-05-18 CLM Claims 11 View
2004-05-18 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2004-04-19 CTNF Non-Final Rejection 7 View
2004-04-19 892 List of references cited by examiner 1 View
2004-04-19 1449 List of References cited by applicant and considered by examiner 9 View
2004-04-19 FWCLM Index of Claims 1 View
2004-04-19 SRFW Search information including classification, databases and other search related notes 1 View
2004-01-26 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-01-22 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-01-22 FOR Foreign Reference 12 View
2004-01-22 FOR Foreign Reference 51 View
2004-01-22 FOR Foreign Reference 39 View
2004-01-20 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2004-01-20 ARTIFACT Artifact sheet indicating an item has been filed which cannot be scanned 1 View
2004-01-16 OATH Oath or Declaration filed 3 View
2003-10-02 TRNA Transmittal of New Application 2 View
2003-10-02 SPEC Specification 51 View
2003-10-02 CLM Claims 10 View
2003-10-02 ABST Abstract 1 View
2003-10-02 DRW Drawings-only black and white line drawings 37 View
2003-10-02 OATH Oath or Declaration filed 2 View
2003-10-02 WFEE Fee Worksheet (SB06) 1 View
2003-10-02 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,807,503
App. No.
10/677,563
Filed
2003-10-02
Granted
2004-10-19
Pub. No.
US20040098216A1
Art Unit
2857
PTA
-99 days