IP Library › Granted Patent US 6,820,028
Granted Patent Utility
US 6,820,028 · Confirmation No. 6795

METHOD AND APPARATUS FOR MONITORING INTEGRATED CIRCUIT FABRICATION

Inventors: Jun Ye, Xun Chen
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2007-04-19 LET. Miscellaneous Incoming Letter 1 View
2005-03-14 COCOUT Certificate of Correction - Post Issue Communication 1 View
2004-11-22 COCIN Request for Certificate of Correction 72 View
2004-07-26 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-07-26 1449 List of References cited by applicant and considered by examiner 10 View
2004-07-02 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-07-02 LET. Miscellaneous Incoming Letter 3 View
2004-06-24 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-24 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-24 1449 List of References cited by applicant and considered by examiner 1 View
2004-06-24 892 List of references cited by examiner 1 View
2004-06-24 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-24 FWCLM Index of Claims 1 View
2004-06-24 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-16 WFEE Fee Worksheet (SB06) 1 View
2004-06-16 FWCLM Index of Claims 1 View
2004-06-07 A.PE Preliminary Amendment 2 View
2004-06-07 CLM Claims 12 View
2004-06-03 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-06-03 FWCLM Index of Claims 1 View
2004-06-03 WFEE Fee Worksheet (SB06) 1 View
2004-05-26 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-05-25 SRNT Examiner's search strategy and results 1 View
2004-05-24 LET. Miscellaneous Incoming Letter 2 View
2004-05-19 A.PE Preliminary Amendment 1 View
2004-05-19 CLM.NE Claim-Amendment Not Entered 11 View
2004-05-19 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-05-19 SRNT Examiner's search strategy and results 1 View
2004-05-06 IDS Information Disclosure Statement (IDS) Form (SB08) 11 View
2004-05-06 1449 List of References cited by applicant and considered by examiner 10 View
2004-01-23 TRNA Transmittal of New Application 4 View
2004-01-23 SPEC Specification 51 View
2004-01-23 CLM Claims 10 View
2004-01-23 ABST Abstract 1 View
2004-01-23 DRW Drawings-only black and white line drawings 37 View
2004-01-23 OATH Oath or Declaration filed 2 View
2004-01-23 A.PE Preliminary Amendment 1 View
2004-01-23 CLM Claims 10 View
2004-01-23 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-01-23 WCLM Claims Worksheet (PTO-2022) 1 View
2004-01-23 WFEE Fee Worksheet (SB06) 1 View
2004-01-23 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,820,028
App. No.
10/763,433
Filed
2004-01-23
Granted
2004-11-16
Pub. No.
US20040153279A1
Art Unit
2857
PTA
0 days