IP Library › Granted Patent US 7,227,692
Granted Patent B2
US 7,227,692 · App. 10/681,308 · Granted Jun 5, 2007

Method and apparatus for balancing color response of imagers

Assignee: Micron Technology, Inc
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Quick Facts
Patent No.
US 7,227,692
App. No.
10/681,308
Granted
Jun 5, 2007
Kind
B2
Abstract

A micro-lens array with reduced or no empty space between individual micro-lenses and a method for forming same. The micro-lens array is formed by patterning a first set of micro-lens material in a checkerboard pattern on a substrate. The first set of micro-lens material is reflowed and cured into first micro-lenses impervious to subsequent reflows. Then, a second set of micro-lens material is patterned in spaces among the first micro-lenses, reflowed and cured into second micro-lenses. The reflows and cures can be conducted under different conditions, and the micro-lenses may be differently sized. The conditions of the reflows can be chosen to ensure that the focal lengths of micro-lenses are optimized for maximum sensor signal.

Claims (86)

1. A micro-lens array, comprising:

a first set of micro-lenses comprising a plurality of first micro-lenses each having a first size and corresponding to a first color; and

a second set of micro-lenses comprising a plurality of second micro-lenses each having a second size and corresponding to a second color,

wherein at least one of said plurality of first micro-lenses at least abuts without overlapping at least one of said plurality of second micro-lenses,

wherein a number of said plurality of first micro-lenses is greater than a number of said plurality of second micro-lenses, and

wherein said first and second sets of micro-lenses are regularly distributed throughout said micro-lens array in accordance with a predetermined color pattern for image capture.

2. The micro-lens array of claim 1 , further comprising a third set of micro-lenses comprising a plurality of third micro-lenses each having a third size and corresponding to a third color, said third set of micro-lenses being regularly distributed throughout said micro-lens array in accordance with said predetermined color pattern.

3. The micro-lens array of claim 2 , wherein said first, second, and third sizes are equal to each other.

4. The micro-lens array of claim 1 , wherein a focal length of each of said plurality of first micro-lenses is approximately equal to a focal length of each of said plurality of second micro-lenses.

5. The micro-lens array of claim 1 , wherein a focal length of each of said plurality of first micro-lenses corresponds to a first wavelength of light, and wherein a focal length of each of said plurality of second micro-lenses corresponds to a second wavelength of light.

6. The micro-lens array of claim 1 , wherein said predetermined color pattern comprises a Bayer pattern.

7. A micro-lens array, comprising:

a first set of micro-lenses comprising a plurality of first micro-lenses;

a second set of micro-lenses comprising a plurality of second micro-lenses; and

a third set of micro-lenses comprising a plurality of third micro-lenses,

wherein said first micro-lenses at least abut without overlapping said second and third micro-lenses,

wherein a number of said plurality of first micro-lenses is greater than a number of said plurality of second micro-lenses, and

wherein said first, second, and third sets of micro-lenses are regularly distributed throughout said micro-lens array in accordance with a predetermined color pattern for image capture.

8. The micro-lens array of claim 7 , wherein said first micro-lenses have a first size and said second micro-lenses have a second size, said second size being no smaller than said first size.

9. The micro-lens array of claim 7 , wherein said first, second, and third micro-lenses each have approximately a same focal length.

10. The micro-lens array of claim 7 , wherein a focal length of each of said plurality of first micro-lenses corresponds to a first wavelength of light, wherein a focal length of each of said plurality of second micro-lenses corresponds to a second wavelength of light, and wherein a focal length of each of said plurality of third micro-lenses corresponds to a third wavelength of light.

11. The micro-lens array of claim 7 , wherein said first, second and third sizes are equal to each other.

12. The micro-lens array of claim 7 , wherein said predetermined color pattern comprises a Bayer pattern.

13. A micro-lens array, comprising:

a first set of micro-lenses comprising a plurality of first micro-lenses; and

a second set of micro-lenses comprising a plurality of second micro-lenses,

wherein said first micro-lenses exhibit different optical transmission properties than said second micro-lenses,

wherein said first micro-lenses abut said second micro-lenses without overlapping,

wherein a number of said plurality of first micro-lenses is greater than a number of said plurality of second micro-lenses, and

wherein said first and second sets of micro-lenses are regularly distributed throughout said micro-lens array in accordance with a predetermined color pattern for image capture.

14. The micro-lens array of claim 13 , comprising a third set of micro-lenses comprising a plurality of third micro-lenses, said third set of micro-lenses being regularly distributed throughout said micro-lens array in accordance with said predetermined color pattern.

15. The micro-lens array of claim 14 , wherein said third micro-lenses exhibit different optical transmission properties than at least one of said first and second micro-lenses.

16. The micro-lens array of claim 15 , wherein said third micro-lenses exhibit different optical transmission properties than both said first and second micro-lenses.

17. The micro-lens array of claim 14 , wherein said first micro-lenses abut said second and third micro-lenses.

18. The micro-lens array of claim 13 , wherein said predetermined color pattern comprises a Bayer pattern.

19. A semiconductor imager, comprising:

a pixel array having embedded pixel cells, each with a photosensor; and a micro-lens array, comprising:

a first set of micro-lenses comprising a plurality of first micro-lenses each having a first size; and

a second set of micro-lenses comprising a plurality of second micro-lenses each having a second size,

wherein the micro-lens array is substantially space-less between at least one of said plurality of first micro-lenses and at least one of said plurality of second micro-lenses,

wherein a number of said plurality of first micro-lenses is greater than a number of said plurality of second micro-lenses, and

wherein said first and second sets of micro-lenses are regularly distributed throughout said micro-lens array in accordance with a predetermined color pattern for image capture.

20. The semiconductor imager of claim 19 , wherein said first size is different than said second size such that pixel cells corresponding to said second micro-lenses receive a greater amount of light than pixel cells corresponding to said first micro-lenses.

21. The semiconductor imager of claim 20 , wherein said first micro-lenses correspond to green pixel cells, and wherein said second micro-lenses correspond to red and/or blue pixel cells.

22. The semiconductor imager of claim 19 , wherein said micro-lens array further comprises a third set of micro-lenses comprising a plurality of third micro-lenses each having a third size, said third set of micro-lenses being regularly distributed throughout said micro-lens array in accordance with said predetermined color pattern.

23. The semiconductor imager of claim 22 , wherein the micro-lens array is substantially space-less between said pluralities of first, second, and third micro-lenses.

24. The semiconductor imager of claim 22 , wherein a focal length of each of said plurality of first micro-lenses is equal to a focal length of each of said plurality of second micro-lenses and a focal length of each of said plurality of third micro-lenses.

25. The semiconductor imager of claim 22 , wherein focal lengths of each of the pluralities of first, second, and third micro-lenses are adjusted for a specific color signal.

26. The semiconductor imager of claim 19 , wherein said predetermined color pattern comprises a Bayer pattern.

27. A semiconductor imager, comprising:

a substrate having pixel cells formed thereon, each with a photosensor; and

a micro-lens array for presenting an image for said pixel cells, said micro-lens array comprising:

a first plurality of first micro-lenses each having a first size; and

a second plurality of second micro-lenses each having a second size larger than said first size,

wherein said second micro-lenses are adapted to collect a greater amount of light than said first micro-lenses,

wherein at least one of said second micro-lenses abuts without overlapping at least one of said first micro-lenses,

wherein a number of said plurality of first micro-lenses is greater than a number of said plurality of second micro-lenses, and

wherein said first and second sets of micro-lenses are regularly distributed throughout said micro-lens array in accordance with a predetermined color pattern for image capture.

28. The semiconductor imager of claim 27 , wherein said first and said second micro-lenses each exhibit a similar focal length.

29. The semiconductor imager of claim 28 , wherein said focal length extends to said photosensors.

30. The semiconductor imager of claim 27 , wherein a focal length of the plurality of first micro-lenses is adjusted for a first color signal, and wherein a focal length of the plurality of second micro-lenses is adjusted for a second color signal.

31. The semiconductor imager of claim 27 , further comprising a color filter array positioned over said pixel cells.

32. The semiconductor imager of claim 31 , wherein said color filter array is positioned between said micro-lens array and said substrate.

33. The semiconductor imager of claim 27 , further comprising a light shield positioned between said micro-lens array and said substrate.

34. The semiconductor imager of claim 27 , wherein said micro-lens array further comprises a third plurality of third micro-lenses each having a third size, said third set of micro-lenses being regularly distributed throughout said micro-lens array in accordance with said predetermined color pattern.

35. The semiconductor imager of claim 34 , wherein said first and third sizes are equal.

36. The semiconductor imager of claim 34 , wherein at least one of said first micro-lenses abuts at least one of said second micro-lenses and at least one of said third micro-lenses.

37. The semiconductor imager of claim 34 , wherein said second and third sizes are equal.

38. The semiconductor imager of claim 27 , wherein said predetermined color pattern comprises a Bayer pattern.

39. A semiconductor imager, comprising:

a substrate having pixel cells formed thereon, each with a photosensor; and

a micro-lens array for presenting an image for said pixel cells, said micro-lens array comprising:

a first set of micro-lenses comprising a plurality of first micro-lenses each having a first size; and

a second set of micro-lenses comprising a plurality of second micro-lenses each having a second size no smaller than said first size,

wherein said second micro-lenses are each positioned in a space between adjacent said first micro-lenses such that said second micro-lenses contact without overlapping said first micro-lenses,

wherein a number of said plurality of first micro-lenses is greater than a number of said plurality of second micro-lenses, and

wherein said first and second sets of micro-lenses are regularly distributed throughout said micro-lens array in accordance with a predetermined color pattern for image capture.

40. The semiconductor imager of claim 39 , further comprising a color filter array positioned over said pixel cells.

41. The semiconductor imager of claim 40 , wherein said color filter array is positioned between said micro-lens array and said substrate.

42. The semiconductor imager of claim 39 , wherein said second size is larger than said first size.

43. The semiconductor imager of claim 39 , wherein said first and said second micro-lenses each exhibit a similar focal length.

44. The semiconductor imager of claim 43 , wherein said focal length extends to said photosensors.

45. The semiconductor imager of claim 39 , wherein a focal length of the plurality of first micro-lenses is adjusted for a first color signal, and wherein a focal length of the plurality of second micro-lenses is adjusted for a second color signal.

46. The semiconductor imager of claim 39 , wherein said micro-lens array further comprises a third plurality of third micro-lenses each having a third size, said third set of micro-lenses being regularly distributed throughout said micro-lens array in accordance with said predetermined color pattern.

47. The semiconductor imager of claim 46 , wherein said first, second, and third sizes are equal.

48. The semiconductor imager of claim 39 , wherein said predetermined color pattern comprises a Bayer pattern.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 9, 2003
From: LI, JIN; BOETTIGER, ULRICH C.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 014599/0066 →
Continuity (1)
Related Publication 20050078377A1 · Apr 14, 2005