Modified electroplating solution components in a low-acid electrolyte solution
View Patent ↗An embodiment of the invention provides a method for reducing within die thickness variations by modifying the concentration of components of a low-acid electroplating solution. For one embodiment, the leveler concentration is increased sufficiently to reduce within die thickness variations to a specified value. For one embodiment of the invention, the leveler and suppressor are increased to reduce within die thickness variations and substantially reduce a plurality of electroplating defects. In such an embodiment the combined concentration of leveler and suppressor is determined to maintain adequate gap fill.
1. A method comprising:
determining a concentration of a conductive metal and of an acid for a low-acid electroplating solution;
determining a concentration of a leveler for the low-acid electroplating solution based upon the concentration of the conductive metal and the acid only after determining the concentration of the conductive metal and the acid such that the leveler concentration is sufficient to reduce a within die thickness variation to a specification value; and
determining a concentration of a suppressor for the low-acid electroplating solution based upon the concentration of leveler only after determining the concentration of the leveler such that the concentration of the suppressor is sufficient to substantially reduce a number of electroplating defects while maintaining the within die thickness variation below the specification value;
evaluating the benefits of reducing the within die thickness variation with the detriments of increased defects when the concentration of the suppressor is increased, the concentration of the leveler and the suppressor are determined as maximum that effect a proper gap fill of a semiconductor wafer;
determining a concentration of a chloride for the low-acid electroplating solution such that the chloride concentration is sufficient to catalyze the suppressor, the concentration of the chloride determined as a minimum to catalyze the suppressor to provide the proper gap fill, the concentration of the chloride based on a feature size and an aspect ratio of the semiconductor wafer; and
determining a concentration of an accelerator for the low-acid electroplating solution based upon the leveler concentration and the suppressor concentration only after determining the concentration of the suppressor and of the leveler, the concentration of the accelerator reduced to allow a maximum concentration of leveler and suppressor, the concentration of the accelerator based on the feature size and the aspect ratio of the semiconductor wafer,
wherein the concentration of the leveler is at least about 12 ml/l.
2. The method of claim 1 wherein the conductive metal is copper and the concentration of the leveler is between about 15 ml/l and about 20 ml/l within the low-acid electroplating solution.
3. The method of claim 1 wherein a combined concentration of leveler and suppressor is determined to be below a specified value.
4. The method of claim 1 wherein the concentration of suppressor is within the range 1 ml/l -6 ml/l of suppressor within the low-acid electroplating solution.
5. The method of claim 1 wherein the accelerator concentration is in the range of 1 ml/l -3.3 ml/l of accelerator within the low-acid electroplating solution.
6. The method of claim 1 wherein the within die thickness variation is less than 2000 Angstroms.
7. The method of claim 1 wherein the number of electroplating defects is less than 100.