Dual layer workpiece masking and manufacturing process
View Patent ↗The status of a plurality of service orders is summarized. A first data set that includes a plurality of records corresponding to service orders, such as requests for initiation of telephone or other communications services, is imported into a database application. At least one query or test may be executed on the first data set to generate a second data set that includes at least part of the first data set and one or more labels that have been appended to at least some of the plurality of records in the first data set. This second data may be imported into a spreadsheet application so that the spreadsheet application can automatically generate a summary of at least some of the data contained in the second data set.
1. A method of creating by a pattern generator features on a workpiece having a substrate, a masking layer, a transfer layer and a resist layer, including:
creating a latent image in the resist layer using a pattern generator;
creating a plasma etch barrier corresponding to said latent image;
directionally etching the transfer layer through said plasma etch barrier;
directionally etching the masking layer through said transfer layer; and
removing said transfer layer, exposing unetched portions of the masking layer;
wherein the resist layer is approximately 150 nm thick and the transfer layer is between 200 and 500 nm thick.
2. The method of claim 1 , wherein the resist layer is approximately 150 nm thick and the transfer layer is approximately 350 nm thick.
3. The method of claim 2 , wherein the transfer layer is essentially non-transmissive to an energy beam used to create said latent image.
4. The method of claim 1 , wherein the transfer layer is removed using a first plasma chemistry.
5. The method of claim 4 , wherein the first plasma chemistry contains halogen ions.
6. The method of claim 4 , wherein the first plasma chemistry is an oxygen plasma.
7. The method of claim 4 , wherein transfer layer is an organic layer and the first plasma chemistry is an oxidizing plasma.
8. The method of claim 1 , wherein the directional etching of the transfer layer and the masking layer is done by RIE-type etching and the removing of the transfer layer is done by a non-preferential oxygen plasma.
9. A method of creating by a pattern generator features on a workpiece having a substrate, a masking layer, a transfer layer and a resist layer, including:
creating a latent image in the resist layer using a pattern generator;
creating a plasma etch barrier corresponding to said latent image;
directionally etching the transfer layer through said plasma etch barrier;
directionally etching the masking layer through said transfer layer; and
removing said transfer layer, exposing unetched portions of the masking layer;
wherein the plasma etch barrier comprises silicon in the resist layer.
10. The method of claim 9 , wherein the silicon in the resist layer is present before the latent image is created.
11. The method of claim 9 , wherein the silicon in the resist layer is added after creating the latent image by treating the resist layer with a silicon compound.
12. The method of claim 9 , wherein the silicon is present in the resist layer before the exposure and a pattern is formed by etching through the resist.
13. The method of claim 9 , wherein the silicon is added to the resist layer by treatment by a silicon compound after the development of the resist layer.
14. A method of creating by a pattern generator features on a workpiece having a substrate, a masking layer, a transfer layer and a resist layer, including:
creating a latent image in the resist layer using a pattern generator;
creating a plasma etch barrier corresponding to said latent image;
directionally etching the transfer layer through said plasma etch barrier;
directionally etching the masking layer through said transfer layer; and
removing said transfer layer, exposing unetched portions of the masking layer;
wherein the plasma etch barrier comprises a separate film between the resist layer and the transfer layer.
15. The method of claim 14 , wherein the plasma etch barrier comprises a thin film deposited by sputtering.
16. The method of claim 14 , wherein the plasma etch barrier comprises a metal-containing film.
17. The method of claim 14 , wherein the plasma etch barrier comprises an aluminum film.
18. The method of claim 14 , wherein the plasma etch barrier comprises a metal oxide film.
19. The method of claim 14 , wherein the plasma etch barrier comprises a silicon-containing film.
20. The method of claim 14 , wherein the plasma etch barrier comprises a silicon oxide film.
21. The method of claim 14 , wherein the plasma etch barrier is patterned by plasma etching through the resist layer.