Tool for removing particles from reticle
View Patent ↗A tool and a process for removing particles from a reticle are described. The tool is disposed in front of a pellicle particle detector, including at least a gas spray member toward a surface of the reticle for removing particles and a supporting member supporting the gas spray member in front of the pellicle particle detector. The supporting member can further fix the tool onto the pellicle particle detector. In the particle removing process, when particles are detected on the reticle, the tool is turned on and the reticle is loaded into the pellicle particle detector through the gas spray member in order to remove the particles from the reticle before the pellicle particle detector detects the particles.
1. A tool for removing particles from a reticle, comprising:
at least a gas spray member, directed toward a surface of the reticle for removing particles; and
a supporting member supporting the gas spray member, disposed in front of a pellicle particle detector, wherein the supporting member fixes the tool onto the pellicle particle detector.
2. The tool of claim 1 , wherein the gas spray member includes a plurality of multi-directional gas spray heads, and each of the multi-directional gas spray heads has a plurality of gas spray holes with different orientations.
3. The tool of claim 2 , wherein the gas spray member includes:
a main body, having a gas supply inlet and a plurality of holes connecting with the gas supply inlet thereon, each of the holes corresponding to one of the multi-directional gas spray heads, and each of the holes having a slant sidewall; and
a plurality of plugs, each embedded in one of the holes, wherein a plurality of longitudinal grooves are disposed around each plug, so that a plurality of gas supply channels are formed between the main body and the plug connecting the gas supply inlet and the gas spray holes.
4. The tool of claim 3 , wherein each of the plugs has a domed top.
5. The tool of claim 2 , wherein each of the multi-directional gas spray heads has four gas spray holes with four different orientations.
6. The tool of claim 1 , wherein the gas spray member is connected with a particle filter.
7. A tool for removing particles from a reticle, comprising:
two gas spray members, allowing the reticle to pass through between them and being directed toward a top surface and a bottom surface respectively of the reticle for removing particles; and
a supporting member, supporting the two gas spray members in front of a pellicle particle detector, wherein the supporting member fixes the tool onto the pellicle particle detector.
8. The tool of claim 7 , wherein each of the two gas spray members includes a plurality of multi-directional gas spray heads thereon, and each of the multi-directional gas spray heads has a plurality of gas spray holes with different orientations.
9. The tool of claim 8 , wherein each of the two gas spray members includes:
a main body, having a gas supply inlet and a plurality of holes connecting with the gas supply inlet thereon, each of the holes corresponding to one of the multi-directional gas spray heads, and each of the holes having a slant sidewall; and
a plurality of plugs, each embedded in one of the holes, wherein a plurality of longitudinal grooves are disposed around each plug, so that a plurality of gas supply channels are formed between the main body and the plug connecting the gas supply inlet and the gas spray holes.
10. The tool of claim 9 , wherein each of the plugs has a domed top.
11. The tool of claim 8 , wherein each of the multi-directional gas spray heads has four gas spray holes with four different orientations.
12. The tool of claim 7 , wherein the two gas spray members are connected to a particle filter.