Method of manufacturing a dual bit flash memory
View Patent ↗A method of manufacturing a non-volatile memory cell is described. The method includes forming a first dielectric layer on a substrate and then forming a patterned mask layer with a trench on the first dielectric layer. A pair of charge storage spacers is formed on the sidewalls of the trench. The patterned mask layer is removed and then a second dielectric is formed on the substrate covering the pair of charge storage spacers. A conductive layer is formed on the second dielectric layer and subsequently patterned to form a gate structure on the pair of charge storage spacers. Portions of the second and first dielectric layers outside the gate structure are removed and then a source/drain region is formed in the substrate on each side of the conductive gate structure.
1. A method of fabricating a dual bit flash memory, comprising the steps of:
providing a substrate;
forming a tunneling dielectric layer over the substrate;
forming a patterned mask layer over the tunneling dielectric layer, wherein the patterned mask layer has a trench;
forming a conductive layer over the substrate to cover the surface of the trench;
removing a portion of the conductive layer to form a pair of conductive spacers on the respective sidewalls of the trench to serve as floating gates;
removing the patterned mask layer;
forming an inter-gate dielectric layer over the substrate to cover the floating gates and the tunneling dielectric layer;
forming a control gate over the inter-gate dielectric layer above the conductive spacers;
forming a pair of dielectric spacers on the sidewalls of the control gate;
removing portions of the inter-gate dielectric layer and the tunneling dielectric layer by using the dielectric spacers and the control gate as hard masks; and
forming source/drain regions in the substrate on each side of the control gate.
2. The method of claim 1 , wherein the tunneling dielectric layer comprises a silicon oxide layer.
3. The method of claim 1 , wherein the patterned mask layer is a silicon oxynitride layer or a silicon nitride layer.
4. The method of claim 1 , wherein the inter-gate dielectric layer is an oxide-nitride-oxide composite layer, an oxide-nitride layer or a silicon oxide layer.
5. The method of claim 1 , wherein the conductive layer comprises a doped polysilicon layer.
6. The method of claim 3 , wherein the step of removing the patterned mask layer comprises performing a wet etching operation using hot phosphoric acid solution.