Ferroelectric capacitor devices and FeRAM devices
View Patent ↗A ferroelectric capacitor device, such as an FeRAM device is formed of a substrate having one or more contact plugs extending therethrough, and a first interlayer dielectric layer formed on the substrate. A spacer layer is formed on the first interlayer dielectric layer, a first oxygen barrier layer is formed on the spacer layer and a buffer layer is formed on the first oxygen barrier layer. A layer of liner material is formed on the buffer layer between the buffer layer and the contact plugs and a dielectric layer is sandwiched between a first electrode and a second electrode. A second oxygen barrier layer is applied to the device. The spacer layer should prevent any oxidation from reaching the interface between the liner material and the contact plugs as this interface is located beneath the first oxygen barrier layer. As a result, the electrical contact is not damaged.
1. A device comprising:
a substrate having a contact plug extending therethrough;
a capacitor mountable on said substrate;
a first interlayer dielectric layer formed on said substrate;
a spacer layer formed on said first interlayer dielectric layer;
a first barrier layer formed on said spacer layer;
a buffer layer formed on said first barrier layer;
a layer of liner material formed on said buffer layer between said buffer layer and said contact plug;
a dielectric layer between a first electrode and a second electrode;
a second barrier layer extending over said device.
2. A device according to claim 1 , wherein said dielectric layer is formed of ferroelectric material.
3. A device according to claim 1 , wherein said first interlayer dielectric layer is formed of boron-doped phosphosilicate glass (BPSG).
4. A device according to claim 1 , wherein said layer of liner material is formed of iridium.
5. A device according to claim 1 , wherein said layer of liner material is formed of iridium oxide.
6. A device according to claim 1 , wherein said first electrode is formed of tungsten.
7. A device according to claim 1 , wherein said spacer layer is formed of electrically insulating material.
8. A device according to claim 7 , wherein said spacer layer is formed of silicon dioxide.
9. A device according to claim 7 , wherein said spacer layer is formed of tetraethyl orthosilicate (TEOS).
10. A device according to claim 1 , wherein said first barrier layer is formed of a material substantially resistant to oxygen diffusion.
11. A device according to claim 1 , wherein said first barrier layer is formed of silicon nitride.
12. A device according to claim 1 , wherein said second barrier layer is formed of a material substantially resistant to oxygen diffusion.
13. A device according to claim 1 , wherein said second barrier layer is formed of aluminium oxide (Al 2 O 3 ).
14. A device according to claim 1 , wherein said buffer layer is formed of dielectric material.
15. A device according to claim 1 , wherein said buffer layer is formed of silicon dioxide.
16. A device according to claim 1 , wherein said layer of liner material forms a glue layer to assist adhesion of said first electrode to said buffer layer.
17. A device according to claim 1 , wherein said dielectric layer is formed of PZT.
18. An FeRAM device comprising one or more devices according to claim 1 .