Electroplated CoWP composite structures as copper barrier layers
View Patent ↗A composite material comprising a layer containing copper, and an electrodeposited CoWP film on the copper layer. The CoWP film contains from 11 atom percent to 25 atom percent phosphorus and has a thickness from 5 nm to 200 nm. The invention is also directed to a method of making an interconnect structure comprising: providing a trench or via within a dielectric material, and a conducting metal containing copper within the trench or the via; and forming a CoWP film by electrodeposition on the copper layer. The CoWP film contains from 10 atom percent to 25 atom percent phosphorus and has a thickness from 5 nm to 200 nm. The invention is also directed to a interconnect structure comprising a dielectric layer in contact with a metal layer; an electrodeposited CoWP film on the metal layer, and a copper layer on the CoWP film.
1. A composite material comprising:
a layer containing copper; and
an electrodeposited CoWP film on the copper layer, wherein the CoWP film contains from 13.2 atom percent to 25 atom percent phosphorus and has a thickness from 5 nm to 200 nm.
2. The composite material of claim 1 wherein the CoWP film contains from 3 atom percent to 10 atom percent tungsten as measured by Rutherford backscattering spectroscopy.
3. The composite material of claim 1 wherein the CoWP film consists essentially of Co x W y P z , wherein 0.75<x<0.85; and x+y+z=1 as measured by Rutherford backscattering spectroscopy.
4. The composite material of claim 1 wherein the copper layer is disposed between the CoWP film and a metal layer.
5. The composite material of claim 4 wherein the copper layer and the metal layer is disposed within a trench or via of a dielectric material.
6. The composite material of claim 5 further comprising a metal cap layer on the CoWP film, wherein the CoWP film and the metal cap layer are disposed within the trench or the via of the dielectric material.
7. The composite material of claim 1 wherein the CoWP film has a thickness from 5 nm to 50 nm.
8. The composite material of claim 1 wherein the CoWP film has a thickness from 10 nm to 30 nm.
9. The composite material of claim 1 wherein the atom percent phosphorous is measured by Rutherford backscattering spectroscapy.
10. The composite material of claim 1 , wherein the CoWP film contains from 16.5 atom percent phosphorus to 25 atom percent phosphorus.
11. An interconnect structure comprising:
a trench or a via disposed within a dielectric material, wherein the french or via is filled with a metal layer disposed along the sidewalls of the trench or the via, and a conducting layer containing copper; and
an amorphous electrodeposited CoWP film on the copper layer, wherein the CoWP film contains 13.2 atom percent to 25 atom percent phosphorus and has a thickness from 5 rim to 200 nm.
12. The interconnect structure of claim 11 wherein the CoWP film contains from 3 atom percent to 10 atom percent tungsten as measured by Rutherford backscattering speetroscopy.
13. The interconnect structure of claim 11 wherein the CoWP film consists essentiajly of Co x W y P z , wherein 0.75<x<0.85; and x+y+z=1 as measured by Rutherford backscattering spectroscopy.
14. The interconnect structure of claim 11 further comprising a CoWP barrier layer disposed between the copper layer and the metal layer, wherein the CoWP barrier layer consists essentially an electrodeposited CoWP film.
15. The interconnect structure of claim 11 further comprising a metal cap layer on the CoWP film.
16. The interconnect structure of claim 11 wherein the CoWP film has a thickness from 5 nm to 50 nm.
17. The interconnect structure of claim 11 wherein the atom percent phosphorous is measured by Rutherford backscattering spectroscopy.
18. The interconnect structure of claim 11 , wherein the CoWP film contains from 16.5 atom percent phosphorus to 25 atom percent phosphorus.