Method for manufacturing semiconductor device
View Patent ↗A method of manufacturing a semiconductor device capable of polishing evenly and separating the adjacent word lines by performing the flattening process using slurry with a doping material added during the polishing process.
1. A method for manufacturing a semiconductor device comprising:
preparing a semiconductor substrate with an active region and a field region;
forming word lines in the active region and the field region of the semiconductor substrate;
depositing an insulator film on top of the word lines;
patterning the insulator film to open word lines in the active region to form a landing plug contact;
depositing a poly silicon film to fill the landing plug contact;
performing a first polishing process using a slurry including Boron and planarizing the poly silicon film and the insulator film only; and
forming a landing plug by performing a second polishing process using a slurry including phosphorous and by polishing the poly silicon film, the insulator film and the hard mask.
2. The method of claim 1 , wherein a concentration of the Boron is in the range of 2 wt % to 5 wt %.
3. The method of claim 1 , wherein a concentration of the Phosphorus is in the range of 2 wt % to 5 wt %.
4. A method for manufacturing a semiconductor device comprising:
preparing a semiconductor substrate having an active region and a field region;
forming word lines in the active region and the field region of the semiconductor substrate;
depositing an insulator film on top of the word lines;
patterning the insulator film to open word lines in the active region to form a landing plug contact;
depositing a poly silicon film to fill the landing plug contact and cover the insulator film;
performing a first polishing process using slurry including a first doping material to increase an etching rate of the poly silicon film with respect to the insulating film to flatten the poly silicon film only and expose the insulator film; and
forming a landing plug by performing a second polishing process using slurry including a second doping material to decrease the etching rate of the poly silicon film with respect to the insulating film and exposing the word lines.
5. The method of claim 4 , wherein the first doping material is boron.
6. The method of claim 5 , wherein a concentration of the boron is in the range of 2 wt % to 5 wt %.
7. The method of claim 6 , wherein the second doping material is phosphorus.
8. The method of claim 7 , wherein a concentration of the phosphorus is in the range of 2 wt % to 5 wt %.
9. The method of claim 5 , wherein the second doping material is phosphorus.
10. The method of claim 4 , wherein the second doping material is phosphorus.
11. The method of claim 10 , wherein a concentration o the phosphorus is in the range of 2 wt % to 5 wt %.