IP Library › Granted Patent US 6,815,900
Granted Patent Utility
US 6,815,900 · Confirmation No. 5923

RADIATION SOURCE WITH HIGH AVERAGE EUV RADIATION OUTPUT

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2004-09-28 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-08-16 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-16 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-08-16 1449 List of References cited by applicant and considered by examiner 1 View
2004-08-16 892 List of references cited by examiner 1 View
2004-08-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-16 FWCLM Index of Claims 1 View
2004-08-16 BIB Bibliographic Data Sheet 1 View
2004-08-16 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-12 SRNT Examiner's search strategy and results 1 View
2003-12-19 TRNA Transmittal of New Application 1 View
2003-12-19 SPEC Specification 19 View
2003-12-19 CLM Claims 6 View
2003-12-19 ABST Abstract 1 View
2003-12-19 DRW Drawings-only black and white line drawings 8 View
2003-12-19 OATH Oath or Declaration filed 2 View
2003-12-19 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-12-19 FRPR Certified Copy of Foreign Priority Application 40 View
2003-12-19 WFEE Fee Worksheet (SB06) 1 View
2003-12-19 WFEE Fee Worksheet (SB06) 1 View
2003-12-19 FOR Foreign Reference 14 View
2003-12-19 FOR Foreign Reference 14 View
2003-12-19 FOR Foreign Reference 60 View
2003-12-19 FOR Foreign Reference 28 View
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Quick Facts
Patent No.
US 6,815,900
App. No.
10/741,882
Filed
2003-12-19
Granted
2004-11-09
Pub. No.
US20040145292A1
Art Unit
2881
PTA
0 days