Image sensors and methods of manufacturing the same
View Patent ↗Image sensors and methods of manufacturing an image sensor are disclosed. A disclosed photo diode may receive short wavelength light in its depletion region without exhibiting defective phenomenon such as noise and dark current. In the illustrated example, this performance is achieved by forming a trench type light-transmission layer to occupy a major surface of the photo diode so as to reduce the area available for defects on the surface of the semiconductor substrate. As a result of this reduction, the depletion region formed upon the operation of the sensor may extend toward the surface of the semiconductor substrate without concern for defects. The image sensor may be manufactured without forming a blocking layer in connection with a silicide layer.
1. An image sensor comprising:
a light-transmission layer embedded and formed in an active region of a semiconductor substrate, wherein a trench recessed in the semiconductor substrate is used as a bottom for the light-transmission layer;
an impurity layer in the active region of the semiconductor substrate and substantially surrounding the light-transmission layer except the top surface of the light-transmission layer to form a photo diode, wherein the photo diode has a shape of a trench in which the light-transmission layer is situated; and
a signal process transistor to carry/discharge photocharges accumulated in the photo diode.
2. An image sensor as defined in claim 1 , wherein the light-transmission layer is comprises a light-transmission oxide layer.
3. The image sensor as defined in claim 2 , wherein the light-transmission oxide layer is any one of an Undoped Silicate Glass (USG) layer, a Boron Silicate Glass (BSG) layer, a Phosphorus Silicate Glass (PSG) layer, a Boron-Phosphorus Silicate Glass (BPSG) layer, a Tetra Ethyl Ortho Silicate (TEOS) layer and a High Density Plasma (HDP) Oxide layer.
4. The image sensor as defined in claim 1 , wherein the impurity layer is formed by N type impurities.
5. An image sensor as defined in claim 1 , wherein a concentration level of impurities forming the impurity layer is lower a concentration level of impurities forming the semiconductor substrate.
6. The image sensor as defined in claim 1 , wherein the impurity layer is in contact five faces of the light-transmission layer.
7. The image sensor as defined in claim 1 , further comprising a buffer oxide layer formed between the light-transmission layer and the photo diode.