Method for forming isolation layer of semiconductor device

1. A method for forming an isolation layer of a semiconductor device, the method comprising the steps of:

a) sequentially laminating a pad oxide layer and a pad nitride layer on a semiconductor substrate;

b) selectively removing the pad nitride layer, selectively removing the pad oxide layer and the semiconductor substrate, thereby forming a trench in the semiconductor substrate;

c) implanting ions in a direction with a tilted angle into a side wall of the pad nitride layer located in an upper side of the trench;

d) removing the side wall portion of the pad nitride layer in the trench, in which the ions are implanted, to form a sloped side wall of the pad nitride layer, wherein the sloped side wall is inclined in an inverse direction;

e) filling a HDP oxide layer in an upper surface of an entire structure including the trench;

f) planarizing the HDP oxide layer and the pad nitride layer; and

g) removing a remaining pad nitride layer, thereby forming an isolation layer.

2. The method as claimed in claim 1 , in step c, the ion implantations are performed in a direction with a tilted angle more than 0°.

3. The method as claimed in claim 1 , wherein step d is performed through a cleaning process using HF-series solution.

4. The method as claimed in claim 1 , wherein the amount of ion implantation in the side wall of the pad nitride layer 35 increases as it goes in a direction of the pad oxidation.