Method and structure for controlling floating body effects
A method for forming an integrated circuit with a semiconductor substrate is provided. A gate dielectric is formed on the semiconductor substrate, and a gate is formed on the gate dielectric. Source/drain junctions are formed in the semiconductor substrate adjacent the gate. A facet is formed in at least one of the source/drain junctions of the integrated circuit.
1. A method for forming an integrated circuit comprising:
providing a semiconductor substrate;
forming a gate dielectric on the semiconductor substrate;
forming a gate on the gate dielectric;
forming source/drain junctions in the semiconductor substrate adjacent the gate; and
forming a facet in at least one of the source/drain junctions of the integrated circuit.
2. The method of claim 1 wherein forming the facet further comprises:
etching the semiconductor substrate; and
filling crystalline material in the etched region.
3. The method of claim 1 wherein forming the facet further comprises:
etching the semiconductor substrate; and
filling crystalline material in the etched region after forming the source/drain junctions.
4. The method of claim 1 wherein forming the facet further comprises:
etching the semiconductor substrate; and
filling crystalline material in the etched region before forming the source/drain junctions.
5. The method of claim 1 wherein forming the facet further comprises:
etching the semiconductor substrate; and
filling doped crystalline material in the etched region.
6. A method for forming an integrated circuit comprising:
providing a semiconductor substrate;
forming a gate dielectric on the semiconductor substrate;
forming a gate on the gate dielectric;
forming source/drain junctions in the semiconductor substrate adjacent the gate;
forming deep source/drain junctions in the semiconductor substrate for the source/drain junctions;
forming a facet in at least one of the source/drain junctions and the deep source/drain junctions;
forming a silicide on the deep source/drain junctions and on the gate;
depositing an interlayer dielectric above the semiconductor substrate; and
forming contacts in the interlayer dielectric to the silicide.
7. The method of claim 6 wherein forming the facet further comprises:
etching the semiconductor substrate; and
filling crystalline material in the etched region by selective epitaxial growth.
8. The method of claim 6 wherein forming the facet further comprises:
etching the semiconductor substrate; and
filling crystalline material in the etched region by selective epitaxial growth after forming the source/drain junctions.
9. The method of claim 6 wherein forming the facet further comprises:
etching the semiconductor substrate; and
filling crystalline material in the etched region by selective epitaxial growth before forming the source/drain junctions.
10. The method of claim 6 wherein forming the facet further comprises:
etching the semiconductor substrate; and
filling doped crystalline material in the etched region by selective epitaxial growth.
11. An integrated circuit comprising:
a semiconductor substrate;
a gate dielectric on the semiconductor substrate;
a gate on the gate dielectric;
source/drain junctions in the semiconductor substrate adjacent the gate; and
a facet in at least one of the source/drain junctions of the integrated circuit.
12. The integrated circuit of claim 11 wherein the facet is formed by etching the semiconductor substrate and filling crystalline material in the etched region.
13. The integrated circuit of claim 11 wherein the facet is formed by etching the semiconductor substrate and filling crystalline material in the etched region after forming the source/drain junctions.
14. The integrated circuit of claim 11 wherein the facet is formed by etching the semiconductor substrate and filling crystalline material in the etched region before forming the source/drain junctions.
15. The integrated circuit of claim 11 wherein the facet is formed by etching the semiconductor substrate and filling doped crystalline material in the etched region.
16. An integrated circuit comprising:
a semiconductor substrate;
a gate dielectric on the semiconductor substrate;
a gate on the gate dielectric;
source/drain junctions in the semiconductor substrate adjacent the gate;
deep source/drain junctions in the semiconductor substrate for the source/drain junctions;
a facet in at least one of the source/drain junctions and the deep source/drain junctions;
a silicide on the deep source/drain junctions and on the gate;
an interlayer dielectric above the semiconductor substrate; and
contacts in the interlayer dielectric to the silicide.
17. The integrated circuit of claim 16 wherein the facet is formed by etching the semiconductor substrate and filling crystalline material in the etched region by selective epitaxial growth.
18. The integrated circuit of claim 16 wherein the facet is formed by etching the semiconductor substrate and filling crystalline material in the etched region by selective epitaxial growth after forming the source/drain junctions.
19. The integrated circuit of claim 16 wherein the facet is formed by etching the semiconductor substrate and filling crystalline material in the etched region by selective epitaxial growth before forming the source/drain junctions.
20. The integrated circuit of claim 16 wherein the facet is formed by etching the semiconductor substrate and filling doped crystalline material in the etched region by selective epitaxial growth.