Disposable hard mask for photomask plasma etching
View Patent ↗A method for creating a photomask which includes a layer of hard mask material the inclusion of which improves the uniformity of critical dimensions on the photomask by minimizing the affect of macro and micro loading. The method for producing the photomask of the instant invention includes two etching processes. The first etching process etches the layer of hard mask, and the second etching process etches the anti-reflective material and opaque material.
1. A finished photomask to be used to create an image on an image plane by means of a photolithographic process, said photomask comprising:
(a) a substantially transparent substrate;
(b) a patterned layer of opaque material disposed on said substantially transparent substrate; and
(c) a patterned layer of hard mask material made from materials, which were selectively resistant to etching in the formation of said finished photomask to account for differences in etch rates in areas of said photomask having larger portions of said pattern layer of opaque material removed than other areas of said photomask, and disposed on said layer of opaque material, wherein substantially the same pattern is formed in said opaque material as is formed in said hard mask material, and said patterns correspond to a scaled negative of the image to be formed on said image plane.
2. The finished photomask of claim 1 further comprising a patterned layer of anti-reflective material disposed between said layer of opaque material and said layer of hard mask material.
3. The finished photomask of claim 1 wherein said image plane is a layer of photosensitive resist material formed on a semiconductor wafer.
4. The finished photomask of claim 1 wherein said opaque material is comprised of Cr.
5. The finished photomask of claim 2 wherein said anti-reflective material is comprised of CrO.
6. The finished photomask of claim 1 wherein said hard mask material is between 50 and 500 Å thick and is comprised of TiN.
7. The finished photomask of claim 1 wherein said hard mask material is between 50 and 500 Å thick and is comprised of Ti.
8. The finished photomask of claim 1 wherein said hard mask material is between 50 and 500 Å thick and is comprised of Si.
9. The finished photomask of claim 1 wherein said hard mask material is between 50 and 500 Å thick and is comprised of Si 3 N 4 .
10. The finished photomask of claim 1 wherein said hard mask material is between 50 and 500 Å thick and is comprised of SiO 2 .
11. The finished photomask of claim 1 wherein said hard mask material is between 50 and 500 Å thick and is comprised of spin-on-glass.
12. The finished photomask of claim 1 wherein said hard mask material is between 50 and 500 Å thick and is comprised of TiW.
13. The finished photomask of claim 1 wherein said hard mask material is between 50 and 500 Å thick and is comprised of W.
14. A blank photomask comprising:
a substantially transparent substrate layer;
an opaque layer disposed on said substantially transparent layer;
a hard mask layer disposed on said opaque layer, said hard mask layer made from materials, which are selectively resistant to etching in said blank photomask to account for differences in etch rates in areas of said blank photomask in which larger portions of said opaque material are to be removed than other areas of said photomask; and
a photosensitive resist material layer disposed on said hard mask layer.
15. The blank photomask of claim 14 , further including a layer of anti-reflective material disposed between said opaque layer and said hard mask layer.
16. The blank photomask of claim 15 , wherein said substrate layer is comprised of quartz, said opaque layer is comprised of chrome and said anti-reflective material is comprised of chrome oxide.
17. The blank photomask of claim 14 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of TiN.
18. The blank photomask of claim 14 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of Ti.
19. The blank photomask of claim 14 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of Si.
20. The blank photomask of claim 14 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of Si 3 N 4 .
21. The blank photomask of claim 14 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of doped SiO 2 , undoped SiO 2 , or a combination of doped SiO 2 and undoped SiO 2 .
22. The blank photomask of claim 14 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of spin-on-glass.
23. The blank photomask of claim 14 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of TiW.
24. The blank photomask of claim 14 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of W.
25. A method for manufacturing a semiconductor comprising the steps of:
interposing a finished photomask between a semiconductor wafer and an energy source, wherein said finished photomask comprises: (a) a substantially transparent substrate; (b) a patterned layer of opaque material disposed on said substantially transparent substrate; and (c) a patterned layer of hard mask material made from materials, which were selectively resistant to etching in the formation of said finished photomask to account for differences in etch rates in areas of said photomask having larger portions of said pattern layer of opaque material removed than other areas of said photomask, and disposed on said layer of opaque material, wherein substantially the same pattern is formed in said opaque material as is formed in said hard mask material;
generating energy in said energy source;
transmitting said generated energy through said pattern formed in said opaque and said hard mask layers of the finished photomask to said semiconductor wafer; and
etching an image on said semiconductor wafer corresponding to said pattern formed in said opaque and said hard mask layers of the finished photomask.
26. The method of manufacturing a semiconductor of claim 25 , wherein said finished photomask further comprises a layer of anti-reflective material disposed between said opaque layer and said hard mask layer.
27. The method of manufacturing a semiconductor of claim 26 , wherein said substantially transparent substrate layer is comprised of quartz, said opaque layer is comprised of chrome and said layer of anti-reflective material is comprised of chrome oxide.
28. The method of manufacturing a semiconductor of claim 25 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of TiN.
29. The method of manufacturing a semiconductor of claim 25 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of Ti.
30. The method of manufacturing a semiconductor of claim 25 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of Si.
31. The method of manufacturing a semiconductor of claim 25 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of Si 3 N 4 .
32. The method of manufacturing a semiconductor of claim 25 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of doped SiO 2 , undoped SiO 2 , or a combination of doped SiO 2 and undoped SiO 2 .
33. The method of manufacturing a semiconductor of claim 25 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of spin-on-glass.
34. The method of manufacturing a semiconductor of claim 25 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of TiW.
35. The method of manufacturing a semiconductor of claim 25 , wherein said hard mask layer is between 50 and 500 Å thick and is comprised of W.