Method for manufacturing a semiconductor device
View Patent ↗The present invention discloses a method for manufacturing a flash memory cell by using a trench method which can eliminate an increase of a stepped portion in a flash process as compared to a logic process by forming a floating gate on a STI portion since the floating gate is added to the flash memory as compared to a logic process. The method comprises the steps of: forming a plurality of trenches on both sides of the center of a silicon substrate; forming a trench isolation by filling the trenches with an insulating material; controlling a bonding ratio between floating gates by controlling the width and depth of the trench isolation at the both sides of the silicon where a tunnel oxide film grows within one cell; depositing a tunnel oxide film and then performing a well formation and a threshold voltage ion implantation; forming a floating gate within the trench isolations by depositing a floating gate polysilicon and then patterning the same into a predetermined shape; sequentially forming an ONO layer and a control gate poly on the patterned floating gates; and forming a control gate by sequentially etching the control gate poly and the ONO layer.
1. A method for manufacturing a flash memory cell by using a trench method, comprising the steps of:
forming a pair of trenches spaced from each other in a silicon substrate;
forming spaced trench isolations by filling the trenches to form recessed trench isolations;
recessing facing portions of the trench isolations;
etching a portion of the silicon substrate between the recessed trench isolations;
depositing a tunnel oxide film on the portion of the silicon substrate, between the recessed trench isolations;
forming a floating gate on the tunnel oxide film, extending to cover the recessed portion of the trench isolations;
forming an oxide-nitride-oxide (ONO) layer to cover the floating gate; and
forming a control gate on the ONO layer;
wherein a coupling ratio between the floating gate and the control gate depends on recessed widths and depths into the trench isolations.
2. The method of claim 1 , further comprising the step of sequentially forming a pad oxide film and a pad nitride film on the silicon substrate before forming the trench.
3. The method of claim 1 , wherein the trench isolation comprising an oxide film.
4. The method of claim 1 , wherein the etching is performed to lower an etched surface of the portion of the substrate to a surface level of the recessed trench isolations.
5. The method of claim 1 , further comprising forming a lightly doped drain (LDD) spacer on the sides of the control gate.
6. The method of claim 5 , further comprising forming n+ junctions in the silicon substrate besides the LDD spacer.