Semiconductor package having semiconductor constructing body and method of manufacturing the same
View Patent ↗A semiconductor package includes at least one semiconductor constructing body which has a semiconductor substrate and a plurality of external connection electrodes formed thereon. An insulating film covers the semiconductor constructing body. Each of interconnections which has a projecting electrode is formed on the insulating film. The projecting electrodes of the interconnection cut through the insulating film at portions corresponding to the external connection electrodes and electrically connected to the external connection electrodes.
1. A semiconductor package comprising:
at least one semiconductor constructing body comprising a semiconductor substrate and a plurality of external connection electrodes provided on the semiconductor substrate;
an insulating film which covers the semiconductor constructing body; and
a plurality of interconnections formed on the insulating film,
wherein each of the interconnections comprises a substantially flat body extending on the insulating film, and a projecting electrode;
wherein each of the projecting electrodes cuts through the insulating film at a portion corresponding to one of the external connection electrodes and is electrically connected to said one of the external connection electrodes, and gradually narrows from the flat body toward said one of the external connection electrodes.
2. The semiconductor package according to claim 1 , wherein the semiconductor package comprises a plurality of semiconductor constructing bodies.
3. The semiconductor package according to claim 1 , wherein the external connection electrodes comprise columnar electrodes, and the semiconductor constructing body further comprises connection pads that are respectively connected to the columnar electrodes, and a sealing film which is formed around the columnar electrodes.
4. The semiconductor package according to claim 3 , wherein the semiconductor constructing body further comprises a plurality of interconnections which respectively electrically connect the connection pads to the columnar electrodes.
5. The semiconductor package according to claim 1 , wherein the insulating film comprises a sheet.
6. The semiconductor package according to claim 5 , wherein the sheet has a flat upper surface.
7. The semiconductor package according to claim 1 , wherein each of the projecting electrodes is integrally formed with the corresponding flat body.
8. The semiconductor package according to claim 1 , wherein each of the projecting electrodes is formed essentially from a metal paste sticking to the corresponding flat body.
9. The semiconductor package according to claim 1 , wherein each of the projecting electrodes has a truncated conical shape.
10. The semiconductor package according to claim 1 , wherein each of the interconnections comprises a connection pad portion, and the semiconductor package further comprises an upper insulating film that is formed above the interconnections and exposes each said connection pad portion.
11. The semiconductor package according to claim 1 , further comprising:
at least one upper insulating film on the insulating film and the interconnections; and
at least one upper interconnection which is formed on the upper insulating film and electrically connected to a connection pad portion of one of the lower connections below the upper insulating film.
12. The semiconductor package according to claim 11 , further comprising another upper insulating film that is formed above the at least one upper interconnection and exposes a connection pad portion of the upper interconnection.
13. The semiconductor package according to claim 11 , wherein the upper interconnection comprises an upper projecting electrode, and the upper projecting electrode cuts through the upper insulating film to be electrically connected to the connection pad portion of the one of the lower interconnections.
14. The semiconductor package according to claim 11 , wherein a solder ball is formed on a connection pad portion of the upper interconnection.
15. The semiconductor package according to claim 1 , further comprising an insulating layer formed on an outer side surface of the semiconductor constructing body.
16. The semiconductor package according to claim 15 , further comprising a base plate arranged on lower surfaces of the semiconductor constructing body and the insulating layer.
17. A method of manufacturing the semiconductor package of claim 1 , said method comprising: covering, with the insulating film, an upper surface of at least one semiconductor constructing body;
arranging, on the insulating film, a metal plate including the projecting electrodes corresponding to the external connection electrodes;
making the projecting electrodes of the metal plate cut through the insulating film and electrically connecting the projecting electrodes to the external connection electrodes; and
forming the interconnections to each include one of the projecting electrodes, by patterning the metal plate.
18. The method according to claim 17 , wherein the external connection electrodes comprise columnar electrodes, and the semiconductor constructing body further comprises connection pads that are respectively electrically connected to the columnar electrodes, and a sealing film which is formed around the columnar electrodes.
19. The method according to claim 18 , wherein the semiconductor constructing body further comprises a plurality of interconnections which respectively electrically connect the connection pads to the columnar electrodes.
20. The method according to claim 17 , wherein the insulating film comprises a sheet.
21. The method according to claim 20 , wherein the sheet has a flat upper surface.
22. The method according to claim 17 , wherein the projecting electrodes are made to cut through the insulating film in a semi-set state of the insulating film, and subsequently the projecting electrode is finally set, such that the metal plate is in tight contact with an upper surface of the insulating film.
23. The method according to claim 17 , wherein the projecting electrodes are formed to be integrated with a lower surface of the metal plate and to have a truncated conical shape by executing half etching of the lower surface of the metal plate.
24. The method according to claim 17 , wherein each of the projecting electrodes is formed to have a truncated conical shape by printing a metal paste on a lower surface of the metal plate.
25. The method according to claim 17 , wherein upper surfaces of a plurality of semiconductor constructing bodies are covered with the insulating film, and the method further comprises, before covering the upper surfaces surfaces of the semiconductor constructing body bodies with the insulation film:
arranging the plurality of semiconductor constructing bodies while separating the semiconductor constructing bodies from each other; and
forming an insulating layer on an outer side surface of the semiconductor constructing bodies;
wherein upper surfaces of the semiconductor constructing bodies and the insulating layer are then covered with the insulating film.
26. The method according to claim 25 , further comprising, after forming the interconnections by patterning the metal plate, cutting the insulating film and the insulating layer between the semiconductor constructing bodies to obtain a plurality of separate said semiconductor packages each including at least one said semiconductor constructing body.
27. The method according to claim 26 , wherein the cutting is performed so as to make each said semiconductor package include a plurality of the semiconductor constructing bodies.
28. The method according to claim 26 , wherein a base plate is arranged on lower surfaces of the semiconductor constructing body and the insulating layer, and the cutting includes cutting the base plate such that each said semiconductor package includes a part of the base plate.
29. The method according to claim 17 , further comprising, after forming the interconnections, forming at least one upper insulating film on the insulating film and the interconnections, and forming upper interconnections on the upper insulating film that are connected to connection pad portions of the lower interconnections below the upper insulating film.
30. The method according to claim 29 , further comprising forming another upper insulating film above the upper interconnections that exposes connection pad portions of the upper interconnections.
31. The method according to claim 29 , wherein each said upper interconnection comprises another projecting electrode, and the method further comprises:
making each said another projecting electrode cut through the upper insulating film; and
electrically connecting the another projecting electrodes to the connection pad portions of the lower interconnections.
32. The method according to claim 29 , further comprising forming a solder ball on a connection pad portion of each of the upper interconnections.