Cleaning solution and cleaning method of a semiconductor device
View Patent ↗A cleaning method for removing foreign bodies during the fabrication of semiconductor devices including treating a substrate with a cleaning solution including an oxidizer to form a chemical oxide layer and then removing the chemical oxide layer, thereby removing foreign bodies from a surface of the semiconductor substrate. Accordingly, the foreign bodies can be substantially removed from the surface of the substrate without corroding a metal.
1. A cleaning solution for removing foreign bodies from a substrate, the cleaning solution comprising:
an iodine based oxidizer to form a chemical oxide layer on said substrate, said iodine based oxidizer is selected from the group consisting of ammonium iodine oxide, potassium iodine oxide, lithium iodine oxide, calcium iodine oxide, barium iodine oxide, potassium iodine, ammonium iodine and any combination thereof;
deionized water;
a fluorine based deoxidizer to remove said chemical oxide layer with said foreign bodies located thereon from said substrate; and
a surface charge controlling agent.
2. The solution of claim 1 , wherein the fluorine based deoxidizer is hydrofluoric acid, hydroboron tetrafluoric acid, ammonium fluoride or any combination thereof.
3. The solution of claim 1 , wherein the surface charge controlling agent is an organic acid, an ionic surfactant or any combination thereof.
4. The solution of claim 3 , wherein the organic acid is citric acid, a tricarboxylic acid, tartaric acid, succinic acid, malic acid, aspartic acid, glutaric acid, adipic acid, suberic acid, oxalic acid, acetic acid, fumaric acid or any combination thereof.
5. The solution of claim 1 , wherein a surface of the substrate is formed of a metal, a metal nitride, a polysilicon or a metal silicide.
6. The solution of claim 1 , wherein the fluorine based deoxidizer is hydrofluoric acid, hydroboron tetrafluoric acid, ammonium fluoride or any combination thereof, and
wherein the surface charge controlling agent is an organic acid, an ionic surfactant or any combination thereof.
7. The solution of claim 6 ,
wherein the organic acid is citric acid, a tricarboxylic acid, tartaric acid, succinic acid, malic acid, aspartic acid, glutaric acid, adipic acid, suberic acid, oxalic acid, acetic acid, fumaric acid or any combination thereof.
8. The solution of claim 7 , wherein a surface of the substrate is formed of a metal, a metal nitride, a polysilicon or a metal silicide.
9. The solution of claim 1 , wherein said surface charge controlling agent is present in an amount of about 0.01 wt %.
10. The solution of claim 1 , wherein said fluorine based deoxidizer is present in an amount of about 10 wt %.
11. The solution of claim 1 , wherein said oxidizer is present in an amount of about 5 wt %.
12. The solution of claim 1 , wherein said surface charge controlling agent is present in an amount of about 0.01 wt %, said fluorine based deoxidizer is present in an amount of about 10 wt %, and said oxidizer is present in an amount of about 5 wt %.