IP Library Granted Patent US 7,176,489
Granted Patent B2
US 7,176,489 · App. 10/872,527 · Granted Feb 13, 2007

Thin-film transistor and method of making same

Assignee: LG. Philips LCD. Co., Ltd.
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,176,489
App. No.
10/872,527
Granted
Feb 13, 2007
Kind
B2
Abstract

A thin-film transistor includes a substrate, and a gate including a double-layered structure having first and second metal layers provided on the substrate, the first metal layer being wider than the second metal layer by 1 to 4 μm. A method of making such a thin-film transistor includes the steps of: depositing a first metal layer on a substrate, depositing a second metal layers directly on the first metal layer; forming a photoresist having a designated width on the second metal layer; patterning the second metal layer via isotropic etching using the photoresist as a mask; patterning the first metal layer by means of an anisotropic etching using the photoresist as a mask, the first metal layer being etched to have the designated width, thus forming a gate having a laminated structure of the first and second metal layers; and removing the photoresist.

Claims (5)

1. A thin film transistor comprising:

a substrate; and

a double-layered metal gate having a first metal layer and a second metal layer thereon, a total width of the first metal layer being greater than a total width of the second metal layer by about 1 to 4 μm.

2. The transistor of claim 1 , wherein the first metal layer has a first and second side portion being exposed from the second metal layer, each side portion being at least about 0.5 μm in width.

3. The transistor of claim 2 , wherein each side portion of the first metal layer is less than about 2 μm in width.

Priority Claims (1)
KR 97-07010 · Mar 4, 1997 · national
Continuity (6)
Division 1037773200 · Mar 4, 2003
Division 1015495500 · May 28, 2002
Continuation 0994050400 · Aug 29, 2001
Division 0924355600 · Feb 2, 1999
Division 0891811900 · Aug 27, 1997
Related Publication 20040229413A1 · Nov 18, 2004