Noninvasive method for characterizing and identifying embedded micropatterns
View Patent ↗The invention relates to a method for noninvasively characterizing embedded micropatterns which are hidden under the surface of a wafer down to 100 μm. The micropatterns are identified with reference micropatterns from a previously produced reference library with the aid of their specific ellipsometric parameters.
1. Method for characterizing embedded microstructures with critical dimensions of between 10 μm and 100 μm, the method comprising:
(a) providing polarized light,
(b) focusing the polarized light onto a predetermined two-dimensional region from a predetermined number of two-dimensional regions at a predetermined number of angles on a wafer which contains the embedded microstructures,
(c) focusing the light, scattered by the respective region on the wafer, onto a detector with the aid of a focusing unit,
(d) interposing a polarization filter between the focusing unit and the detector,
(e) recording intensity spectra for a specific number of polarization planes, angles of incidence and a specific wavelength region,
(f) calculating the ellipsometric parameters Ψ and Δ for a specific wavelength region,
(g) determining the ellipsometric parameters after the method steps (a)-(f) for the remaining predetermined two-dimensional regions of the wafer,
(h) storing the ellipsometric parameters Ψ and Δ for the specific number of angles φ and the two-dimensional regions of the wafer in a data record,
(i) comparing the data record with the predetermined reference data records from a reference data library, and
(j) determining the reference data record which corresponds most highly to the data record in accordance with a predetermined criterion for providing characterization of embedded microstructures to a database, wherein the most highly corresponding reference data record is that which has the smallest metric distance on the measured data record.
2. Method according to claim 1 , wherein spectra are recorded in the wavelength region between λ=1.4-16 μm.
3. Method according to claim 1 wherein the reference data records of the reference data library are generated in the following steps of
(a) providing a wafer with a test micropattern of known depth profile,
(b) determining a data record using the method steps (a)-(g) in accordance with claim 1 , and
(c) storing the ellipsometric parameters ψ and Δ for the specific number of angles φ and the regions of the wafer in a reference data record.
4. Method according to claim 1 wherein the data records of the reference library are generated by means of RCWA on wafers with model micropatterns with known depth profiles.
5. Method according to claim 1 , wherein the embedded micropatterns are constructed from layers of different materials.
6. Method according to claim 1 , wherein the number of the spectroscoped two-dimensional regions is 5, 9 or 49, and they always have an ellipse of magnitude 80 μm×300 μm.
7. Method for characterizing embedded microstructures with critical dimensions of between 10 μm and 100 μm, the method comprising:
(a) providing polarized light;
(b) focusing the polarized light onto a predetermined two-dimensional region from a predetermined number of two-dimensional regions at a predetermined number of angles on a wafer which contains the embedded microstructures;
(c) focusing the light, scattered by the respective region on the wafer, onto a detector with the aid of a focusing unit;
(d) interposing a polarization filter between the focusing unit and the detector;
(e) recording intensity spectra for a specific number of polarization planes, angles of incidence and a specific wavelength region;
(f) calculating the ellipsometric parameters Ψ and Δ for a specific wavelength region;
(g) determining the ellipsometric parameters after the method steps (a)-(f) for the remaining predetermined two-dimensional regions of the wafer;
(h) storing the ellipsometric parameters Ψ and Δ for the specific number of angles φ and the two-dimensional regions of the wafer in a data record;
(i) comparing the data record with the predetermined reference data records from a reference data library; and
(j) determining the reference data record which corresponds most highly to the data record in accordance with a predetermined criterion for providing characterization of embedded microstructures to a database, wherein the wafer is classified as defective or intact with the aid of the degree of correspondence in accordance with a specific criterion between the data record and a predetermined reference data record, and wherein the degree of correspondence is given by the metric distance.