Method for making a semiconductor device with reduced spacing
View Patent ↗Floating gates are formed in two separate polysilicon depositions steps resulting in distinct portions. The first formed portions are between isolation regions. A thick insulator is formed over the isolation regions and floating gate portions. The thick insulator is patterned to leave fences over the isolation regions. A thinning process, an isotropic etch in this example, is applied to these fences to make them thinner. Polysilicon sidewall spacers are formed on the sides of these fences. These sidewall spacers become the second portion of the floating gate. These second portions have the desired shape for significantly increasing the capacitance to the subsequently formed control gates, thereby reducing the gate voltage required for programming and erasing made by a relatively robust process.
1. A method of making a semiconductor device, the method comprising:
forming a first structure including a first sidewall and a second sidewall, the first sidewall is opposite the second sidewall, wherein the first structure includes an oxide;
thinning the first structure, wherein the thinning includes reducing the distance between the first sidewall and the second sidewall;
forming a first semiconductor structure adjacent to the first sidewall subsequent to the thinning;
forming a second semiconductor structure adjacent to the second sidewall subsequent to the thinning; and
removing at least a portion of the first structure between the first semiconductor structure and the second semiconductor structure.
2. The method of claim 1 wherein the first structure is characterized as a dielectric structure.
3. The method of claim 1 wherein the first structure includes TEOS.
4. The method of claim 1 wherein the first semiconductor structure includes polysilicon and the second semiconductor structure includes polysilicon.
5. The method of claim 1 wherein the first semiconductor structure is characterized as a spacer and the second semiconductor structure is characterized as a spacer.
6. The method of claim 1 wherein the thinning further includes performing an isotropic etch.
7. The method of claim 1 wherein the forming the first structure includes:
forming a first layer of material; and
patterning the first layer of material.
8. The method of claim 7 wherein the thinning further includes performing an anisotropic etch of the first layer of material.
9. The method of claim 7 wherein the forming the first layer of material includes:
depositing the first layer of material.
10. The method of claim 9 wherein the first layer of material includes a dielectric material.
11. The method of claim 1 wherein the removing includes forming a void between the first semiconductor structure and the second semiconductor structure, the method further comprising:
forming a semiconductor material in the void.
12. The method of claim 1 further comprising:
forming a first floating gate; and
forming a second floating gate;
wherein the removing includes forming a void between the first semiconductor structure and the second semiconductor structure;
wherein the first floating gate includes at least a portion of the first semiconductor structure, and
wherein the second floating gate includes at least a portion of the second semiconductor structure.
13. The method of claim 11 further comprising:
forming a word line, the word line including a portion located over the first floating gate and a portion located over the second floating gate, the forming the word line includes forming word line material in the void.
14. The method of claim 1 wherein the removing includes forming a void between the first semiconductor structure and the second semiconductor structure, the method further comprising forming a dielectric material in the void.
15. The method of claim 1 wherein the removing includes exposing a sidewall of the first semiconductor structure and exposing a sidewall of the second semiconductor structure at a location between the first semiconductor structure and the second semiconductor structure, the method further comprising:
forming a dielectric on the sidewall of the first semiconductor structure and forming a dielectric on the sidewall of the second semiconductor structure.
16. The method of claim 15 wherein the dielectric on the sidewall of the first semiconductor structure and the dielectric on the sidewall of the second semiconductor structure are each characterized as including an oxide, nitride, oxide configuration.
17. The method of claim 1 wherein the removing includes removing all of the first structure.
18. The method of claim 1 wherein the first structure is formed over an isolation region.
19. The method of claim 1 wherein the first semiconductor structure and the second semiconductor structure of semiconductor material are electrically isolated from each other.
20. The method of claim 1 wherein:
the forming the first structure includes forming a layer of first structure material and forming a patterned structure over the layer of first structure material;
the thinning includes etching the layer of first structure material with the patterned structure located over the first structure; and
the method further includes removing the patterned structure subsequent to the thinning.
21. The method of claim 1 wherein the semiconductor device is further characterized as being in a semiconductor substrate having an isolation region between a first gate structure and a second gate structure, wherein:
the step of forming the first structure is further characterized by forming the first structure over the isolation region;
the step of forming the first semiconductor structure is further characterized by forming the first semiconductor structure in contact with the first gate structure;
the step of forming the second semiconductor structure is further characterized by forming the second semiconductor structure in contact with the second gate structure.
22. The method of claim 21 further comprising:
forming a dielectric layer on the first and second semiconductor structures and the first and second gate structures; and
forming a conductive layer over the dielectric layer.
23. A method of making a semiconductor device on a semiconductor substrate having an isolation region between a first floating gate structure and a second floating gate structure, the method comprising:
forming a first structure including a first sidewall and a second sidewall, the first sidewall is opposite the second sidewall, wherein the first structure is formed over the isolation region, the first structure formed by depositing a first layer over the isolation region and ratterning the first layer to leave the first structure over a middle portion of the isolation region;
thinning the first structure, wherein the thinning includes reducing the distance between the first sidewall and the second sidewall;
forming a first semiconductor structure adjacent to the first sidewall subsequent to the thinning and in contact with the first floating gate structure;
forming a second semiconductor structure adjacent to the second sidewall subsequent to the thinning in contact with the second floating gate structure; and
removing at least a portion of the first structure between the first semiconductor structure and the second semiconductor structure.
24. The method of claim 23 further comprising:
forming a dielectric layer on the first and second semiconductor structures and the first and second floating gate structures; and
forming a conductive layer over the dielectric layer.