Ultra-thin die and method of fabricating same
View Patent ↗In accordance with a specific embodiment, a method of processing a semiconductor substrate is disclosed whereby the substrate is thinned, and the dice formed on the substrate are singulated by a common process. Trench regions are formed on a backside of the substrate. An isotropic etch of the backside results in a thinning of the substrate while maintaining the depth of the trenches, thereby facilitating singulation of the die.
1. A method comprising:
forming a mask layer overlying a backside of a semiconductor substrate;
forming trench regions in the mask layer, the trench regions in the mask layer defining where dice are to be formed from the semiconductor substrate;
subsequent to forming the trench regions, etching the mask layer and the semiconductor substrate to simultaneously remove the mask layer and to form trench regions in the semiconductor substrate; and
subsequent to etching the mask layer, etching from the backside of the semiconductor substrate to simultaneously thin the semiconductor substrate and to singulate the semiconductor substrate into a plurality of die.
2. The method of claim 1 , wherein forming the trench regions in the mask layer comprises aligning the trench regions in the mask layer with features formed overlying a frontside of the semiconductor substrate.
3. The method of claim 1 further comprising:
attaching a handling substrate overlying a frontside of the semiconductor substrate prior to etching the mask layer.
4. The method of claim 3 further comprising:
forming a back-metal layer overlying a backside of a die of the plurality of die.
5. The method of claim 4 further comprising:
removing the handling substrate from the plurality of die after forming the back-metal layer.
6. The method of claim 1 wherein etching from the backside of the semiconductor substrate comprises detecting an endpoint.
7. The method of claim 6 wherein detecting the endpoint includes detecting a layer formed overlying a frontside of the semiconductor substrate.
8. The method of claim 6 wherein etching from the backside of the semiconductor substrate comprises etching a predetermined amount of time after detecting the endpoint.
9. The method of claim 1 , wherein the plurality of die have a final thickness of less than 65 microns.
10. The method of claim 1 , wherein the plurality of die have a final thickness of less than 51 microns.
11. The method of claim 1 , wherein the plurality of die have a final thickness of less than 40 microns.
12. The method of claim 1 , further comprising thinning the semiconductor substrate prior to forming the mask layer.
13. The method of claim 12 , wherein thinning the semiconductor substrate includes using a back-grind process.
14. A method comprising:
forming a trench region within the backside of a semiconductor substrate having a first thickness; and
subsequent to forming the trench region, etching from the backside of the semiconductor substrate to form a plurality of die of a desired thickness from the semiconductor substrate, wherein the desired thickness is less than the firsts thickness, wherein the first thickness and the desired thickness are measured from a first major surface to a second major surface of the semiconductor substrate.
15. The method of claim 14 , wherein forming the trench region within the backside of the semiconductor substrate comprises:
forming a mask layer overlying the backside of the semiconductor substrate; and
forming a trench region within the mask layer to facilitate forming the trench region within the backside of the semiconductor substrate.
16. The method of claim 15 , wherein forming the trench region within the backside of the semiconductor substrate further comprises:
after forming the trench region within the mask layer, removing the mask layer while simultaneously forming the trench region within the backside of the substrate.
17. The method of claim 16 , wherein,
forming the mask layer further includes the mask layer comprising a photoresist material; and
forming the trench region within the mask layer includes using photolithography.
18. The method of claim 17 , wherein forming the trench region within the mask layer further includes the trench region within the mask layer having a depth substantially equal to a thickness of the mask layer.
19. The method of claim 14 , wherein the trench region within the backside of the semiconductor substrate is aligned to a feature formed overlying a frontside of the semiconductor substrate.
20. A method comprising:
etching a backside surface of a semiconductor substrate to thin at least a portion of the semiconductor substrate that corresponds to a die location; and
exposing, during etching of the backside surface, a sidewall portion of an outer edge of a die to be formed at the die location.
21. The method of claim 20 , wherein exposing comprises exposing the entire sidewall of the die.
22. The method of claim 20 , wherein the at least a portion of the semiconductor substrate is the entire semiconductor substrate.
23. A method comprising:
forming a trench region within a backside of a semiconductor substrate at a location between a first semiconductor device and a second semiconductor device; and
etching the backside of the semiconductor substrate to simultaneously thin the first and second semiconductor devices and to expose a first sidewall of the first semiconductor device, wherein the first sidewall is a portion of the circumference of the first semiconductor device.