Integrated circuit device, and method of fabricating same
View Patent ↗There are many inventions described and illustrated herein. In a first aspect, the present invention is directed to integrated circuit device including SOI logic transistors and SOI memory transistors, and method for fabricating such a device. In one embodiment, integrated circuit device includes memory portion having, for example, PD or FD SOI memory cells, and logic portion having, for example, high performance transistors, such as Fin-FET, multiple gate transistors, and/or non-high performance transistors (such as single gate transistors that do not possess the performance characteristics of the high performance transistors).
1. An integrated circuit device disposed in or on a semiconductor layer which resides on or above an insulating layer of a substrate, the integrated circuit device comprising:
memory section including a plurality of memory cells wherein each memory cell includes a transistor having:
a source region;
a drain region;
a body region disposed between the source region and the drain region, wherein the body region is electrically floating; and
a gate spaced apart from, and capacitively coupled to, the body region; and wherein each memory cell includes:
a first data state which is representative of a first charge in the body region wherein the first charge is substantially provided by accumulating majority carriers in the body region; and
a second data state which is representative of a second charge in the body region wherein the second charge is substantially provided by removing majority carriers from the body region; and
a logic section including a plurality of transistors wherein each transistor includes:
a source region;
a drain region;
a body region disposed between the source region and the drain region, wherein the source, drain and body regions of an associated transistor are disposed in a segment of the semiconductor layer such that the body region includes a plurality of surfaces; and
a gate spaced apart from and opposing the plurality of surfaces of the body region.
2. The integrated circuit device of claim 1 wherein the width of the gate of each transistor of the plurality of transistors of the logic section is less than the width of the gate of each transistor of each memory cell of the memory section.
3. The integrated circuit device of claim 1 wherein source, drain and body regions of a plurality of transistors of the logic section are contained in a segment of the semiconductor layer.
4. The integrated circuit device of claim 3 wherein the source, drain and body regions of the plurality of transistors of the logic section are contained in a plurality of segments of the semiconductor layer.
5. The integrated circuit device of claim 4 wherein each segment of the plurality of segments contains source, drain and body regions of a plurality of transistors of the logic section.
6. The integrated circuit device of claim 1 wherein the source, drain and body regions of the transistors of the memory cells are disposed in a segment of the semiconductor layer.
7. The integrated circuit device of claim 6 wherein the body region of each transistor of each memory cell of the memory section includes a plurality of surfaces and wherein the associated gate is spaced apart from and opposing the plurality of surfaces of the body region.
8. The integrated circuit device of claim 7 wherein the width of the gate of each transistor of the plurality of transistors of the logic section is less than the width of the gate of each transistor of each memory cell of the memory section.
9. The integrated circuit device of claim 1 wherein the gates of a plurality of transistors of the logic section are interconnected.
10. The integrated circuit device of claim 1 wherein the gates of a plurality of transistors of the memory section are interconnected.
11. The integrated circuit device of claim 1 wherein the semiconductor layer which resides on or above an insulating layer of a substrate is a portion of an SOI wafer.
12. The integrated circuit device of claim 1 , wherein the semiconductor layer includes a plurality of memory section segments, and wherein the source, drain and body regions of the transistor of each memory cell of the plurality of memory cells is disposed in a memory section segment.
13. The integrated circuit device of claim 12 wherein the width of the gate of each transistor of the plurality of transistors of the logic section is less than the width of the gate of each transistor of each memory cell of the memory section.
14. The integrated circuit device of claim 12 wherein source, drain and body regions of a plurality of transistors of the logic section are contained in a segment of the semiconductor layer.
15. The integrated circuit device of claim 14 wherein the source, drain and body regions of the plurality of transistors of the logic section are contained in a plurality of segments of the semiconductor layer.
16. The integrated circuit device of claim 12 wherein at least one memory section segment is arranged parallel to at least one logic section segment.
17. The integrated circuit device of claim 12 wherein at least one memory section segment is arranged perpendicular to at least one logic section segment.
18. The integrated circuit device of claim 12 wherein each memory section segment is arranged parallel to at least one logic section segment.
19. The integrated circuit device of claim 12 wherein each memory section segment is arranged perpendicular to at least one logic section segment.
20. The integrated circuit device of claim 12 wherein the body region of each transistor of each memory cell of the memory section includes a plurality of surfaces and wherein the associated gate is spaced apart from and opposing the plurality of surfaces of the body region, wherein the body region of each transistor includes a first surface and wherein the associated gate is spaced apart from and opposing the first surface of the body region.
21. The integrated circuit device of claim 20 wherein the width of the gate of each transistor of the plurality of transistors of the logic section is less than the width of the gate of each transistor of each memory cell of the memory section.
22. The integrated circuit device of claim 12 wherein the width of the body region of each transistor of the plurality of transistors of the logic section is less than the width of the body region of each transistor of each memory cell of the memory section.