Semiconductor device having void free contact and method for fabricating the contact
View Patent ↗The present invention relates to a semiconductor device and a method for fabricating a contact of the semiconductor device, and in particular, to the method for fabricating a semiconductor contact of the device for electrically coupling upper and lower metal wires or coupling an electrode and a metal wire and a method for fabricating the contact. The method includes forming an interlayer insulating layer on a semiconductor substrate; forming a contact hole by selectively removing the interlayer insulating layer; forming a barrier metal layer on a surface of the interlayer insulating layer, increasing roughness of a surface of the barrier layer at an area around an inlet of the contact hole; and forming a contact by filling the contact hole with a conductive material. According to this method, the conductive layer is slowly deposited around the inlet of the contact hole relative to the other areas of the contact bole, such that it is possible to form a void free contact with a high aspect ratio.
1. A method for fabricating a contact of a semiconductor device comprising:
forming a dielectric layer on a semiconductor substrate;
forming a contact hale by selectively removing the dielectric layer at positions corresponding to a source and drain;
depositing a barrier metal layer on a surface of the dielectric layer;
increasing roughness of a surface of the barrier metal layer at an area around an inlet of the contact hole, wherein a surface roughness at a bottom of the contact hole remains substantially unchanged;
forming a contact by filling the contact hole with a conductive material.
2. The method of claim 1 , wherein the roughness increasing step comprises exposing the surface at the area around the inlet of the contact hole to a plasma treatment.
3. The method of claim 2 , wherein the plasma comprises an inert ion.
4. The method of claim 3 , wherein the inert ion comprises Kr, Xe, Rn, Ar, He or N 2 .
5. The method of claim 4 , wherein the plasma treatment comprises applying a power in the range of 50˜500 W and a pressure in the range of 1 mTorr˜10 mTorr.
6. The method of claim 1 , wherein forming a contact further comprises depositing an initial conductive layer on the barrier metal layer, wherein the initial conductive layer has a greater thickness at the bottom of the contact hole than at the area around the inlet of to contact hole.
7. The method of claim 6 , wherein said initial conductive layer comprises W.
8. The meted of claim 1 , further comprising depositing said conductive material on the barrier metal layer, wherein a rate of deposition is greater at the bottom of the contact hole than at the area around the inlet of the contact hole.
9. The method of claim 8 , wherein said conductive material comprises W.
10. The method of claim 8 , where said conductive material depositing step comprises chemical vapor deposition (CVD).
11. The method of claim 1 , wherein said barrier metal depositing step comprises chemical vapor deposition (CVD).
12. The method of claim 1 , wherein said barrier metal depositing step comprises physical vapor deposition (PVD).
13. The method of claim 1 , wherein said contact hole has a high aspect ratio.
14. The method of claim 1 , wherein said barrier metal layer comprises Ti or TiN.
15. The method of claim 1 , wherein said barrier metal layer comprises a multilayered film comprising Ti and TiN.
16. The method of claim 1 , further comprising annealing said barrier metal layer.
17. The method of claim 1 , further comprising forming a silicide layer at a bottom surface of the contact hole.