Operational model for simulating manufacture flow and simulating method thereof
View Patent ↗The present invention discloses an operational model for simulating a manufacturing flow. The operational model includes an operational block, an operational library, a strategic block and a strategic library. The operational block is built in accordance with operational data of the equipments, and the operational library is built by integrating a plurality of operational blocks. The strategic block is built in accordance with throughput data of the equipments, and the strategic library is built by integrating a plurality of strategic blocks.
1. A simulating method of manufacturing flow which is applied in a semiconductor foundry, the simulating method comprising:
building a plurality of operational blocks in accordance with operational data of each manufacturing equipment;
integrating the operational blocks and building at least one operational library;
building a plurality of strategic blocks in accordance with throughput data of each manufacturing equipment;
integrating the strategic blocks and building at least one strategic library;
collecting data from the operational library and strategic library and building a operational model; and
performing manufacturing flow simulation in accordance with the operational model.
2. The method of claim 1 wherein the manufacturing equipments include process equipments, transferring equipments, material delivering equipments and material storage equipments.
3. The method of claim 1 wherein the operational equipments include etching equipments, exposure equipments, rail guided vehicles (RGV) and stockers.
4. The method of claim 1 wherein the operational data comprises each hardware specification data, operational data, and user demand specification data of the manufacturing equipments.
5. The method of claim 1 wherein the throughput data comprises each manufacturing flow data, operational procedure data, and material transfer flow data of the manufacturing equipments.
6. The method of claim 1 wherein when the operational model is built, a 12-inch wafer foundry model is established.
7. The method of claim 1 wherein when the operational model is built, a section manufacturing line is established.
8. An operational model simulation of a 12-inch wafer foundry built in accordance with the method of claim 1 .
9. An operational model simulating the manufacturing flow of a semiconductor foundry, the operational model comprising:
an operational library including a plurality of operational blocks built in accordance with each operational data of each manufacturing equipment; and
a strategic library including a plurality of strategic blocks built in accordance with each throughout data of each manufacturing equipment.
10. The model of claim 9 wherein the manufacturing equipments include process equipments, material transfer equipments and material storage equipments.
11. The model of claim 9 wherein the process equipments include etching equipments, exposure equipments, rail guided vehicles (RGV) and stockers.
12. The model of claim 9 wherein the operational data comprises each hardware specification data, operational specification data, and user demand specification data of the manufacturing equipments.
13. The model of claim 9 wherein the throughput data comprises each manufacturing flow data, operational procedure data, and material transfer flow data of the manufacturing equipments.
14. The model of claim 9 wherein the operational model is a complete 12-inch wafer foundry model.
15. The model of claim 9 wherein operational model is a section manufacturing line model.