Method of discharging a semiconductor device
View Patent ↗In one embodiment, a method for discharging a semiconductor device includes providing a semiconductor substrate, forming a hole blocking dielectric layer over the semiconductor substrate, forming nanoclusters over the hole blocking dielectric layer, forming a charge trapping layer over the nanoclusters, and applying an electric field to the nanoclusters to discharge the semiconductor device. Applying the electric field may occur while applying ultraviolet (UV) light. In one embodiment, the hole blocking dielectric layer comprises forming the hole blocking dielectric layer having a thickness greater than approximately 50 Angstroms.
1. A method for discharging a semiconductor device comprising:
providing a semiconductor substrate;
forming a hole blocking dielectric layer over the semiconductor substrate, wherein forming the hole blocking dielectric layer comprises forming the hole blocking dielectric layer having a thickness greater than approximately 50 Angstroms;
forming nanoclusters over the hole blocking dielectric layer;
forming a charge trapping layer over the nanoclusters; and
applying an electric field to discharge the semiconductor device, wherein applying the electric field further comprises:
applying the electric field to the nanoclusters to create an electron-hole pair, wherein the electron-hole pair comprises a first electron and a first hole;
tunneling the first electron from one of the nanoclusters through the hole blocking dielectric layer into the semiconductor substrate; and
driving the first hole from one of the nanoclusters into the charge trapping layer, wherein the charge trapping layer comprises a second electron and the first hole combines with the second electron.
2. The method of claim 1 , further comprising forming a dielectric layer over the charge trapping layer.
3. The method of claim 1 , wherein forming the nanoclusters comprises forming nanoclusters covering at least approximately 15 percent of an area of the hole blocking dielectric layer.
4. The method of claim 1 , wherein forming the nanoclusters comprises forming the nanoclusters having an element selected from the group consisting of silicon, germanium, gallium, and arsenic.
5. The method of claim 1 , wherein forming the nanoclusters comprises forming the nanoclusters comprising a material with a band gap less than that of silicon.
6. The method of claim 1 , wherein forming the nanoclusters comprises implanting an element into the nanoclusters.
7. The method of claim 1 , wherein applying the electric field comprises applying ultraviolet (UV) light.
8. The method of claim 1 , wherein forming the hole blocking dielectric layer comprises forming the hole blocking dielectric layer, wherein the hole blocking dielectric layer comprises an electron tunneling dielectric layer.
9. The method of claim 1 , wherein forming the charge trapping layer over the nanoclusters, comprises forming the charge trapping layer over the nanoclusters so that the nanoclusters are within the charge trapping layer.
10. The method of claim 1 , wherein applying the electrical field comprises uniformly erasing the semiconductor device.
11. The method of claim 10 , wherein uniformly erasing comprises applying a voltage that has an absolute value of approximately 10 Volts to approximately 18 Volts.