Programming and erasing structure for an NVM cell
View Patent ↗A non-volatile memory (NVM) has a silicon germanium (SiGe) drain that is progressively more heavily doped toward the surface of the substrate. The substrate is preferably silicon and the drain is formed by first forming a cavity in the substrate in the drain location. SiGe is epitaxially grown in the cavity with an increasing doping level. Thus, the PN junction between the substrate and the drain is lightly doped on both the P and N side. The drain progressively becomes more heavily doped until the maximum desired doping level is reached, and the remaining portion of the SiGe drain is doped at this maximum desired level. As a further enhancement, the perimeter of the SiGe in the substrate is the same conductivity type as that of the substrate and channel. Thus a portion of the channel is in the SiGe.
1. A method of forming a portion of a semiconductor device comprising:
providing a p-type substrate;
forming a gate stack structure overlying the substrate;
forming a source region adjacent the gate stack structure by;
removing a first portion of the substrate adjacent the gate stack structure; and
epitaxially growing silicon carbon to replace the removed first portion of the substrate; and
forging a graded n-type in-situ doped drain region adjacent the gate stack structure and on a side opposite that of the source region by:
removing a second portion of the substrate adjacent the gate stack structure on the side opposite the source region; and
epitaxially growing silicon germanium to replace the second portion.
2. The method of claim 1 , wherein forming the graded in-situ doped drain region includes providing a portion thereof having a substantially constant dopant profile.
3. The method of claim 2 , further wherein the gate stack comprises a storage layer.
4. The method of claim 1 , wherein forming the graded in-situ doped drain region includes linearly grading a portion of a dopant profile of the graded in-situ doped drain region.
5. The method of claim 1 , wherein forming the graded in-situ doped drain region includes non-linearly grading a portion of a dopant profile of the graded in-situ doped drain region.
6. The method of claim 1 , wherein forming the graded in-situ doped drain region includes step grading a portion of a dopant profile of the graded in-situ doped drain region.
7. The method of claim 1 , wherein the graded n-type in-situ doped drain region comprises a material having a bandgap that is smaller than a bandgap of a material of the substrate.
8. The method of claim 1 , wherein the graded in-situ doped drain region includes a dopant concentration profile configured to enhance a band to band hole generation.
9. The method of claim 8 , further wherein the dopant concentration profile is substantially constant.
10. The method of claim 8 , further wherein the dopant concentration has a gradually changing dopant concentration, changing from a first dopant concentration to at least one additional dopant concentration, the at least one additional dopant concentration being different from the first dopant concentration.
11. The method of claim 8 , further wherein the dopant concentration has a gradually increasing dopant concentration, increasing from a first dopant concentration to at least one additional dopant concentration, the at least one additional dopant concentration being greater than the first dopant concentration.
12. The method of claim 8 , further wherein the dopant profile comprises a stepped dopant profile.
13. The method of claim 12 , still further from a first step to at least one additional step, the at least one additional step having a dopant concentration different from a dopant concentration of the first step.
14. The method of claim 12 , wherein the stepped dopant profile includes two or more dopant concentration steps having different dopant concentrations.
15. The method of claim 1 , further comprising:
forming a p-type in-situ doped region prior to forming the graded n-type in-situ doped drain region, wherein the in-situ doped p-type region and n-type region together form a junction on a drain side of the semiconductor device.
16. The method of claim 15 , wherein the p-type in-situ doped region comprises a material that can be epitaxially grown on the substrate and that has a band-gap smaller than a band-gap of the substrate.
17. The method of claim 15 , wherein the substrate includes silicon.
18. The method of claim 15 , wherein the graded n-type in-situ doped drain region and the p-type in-situ doped region each comprise a material having a bandgap that is smaller than a bandgap of a material of the substrate, and wherein during device operation, the graded n-type in-situ doped drain region enhances a first impact ionization that creates an electron/hole pair within the drain region, wherein a hole generated from the first impact ionization accelerates and traverses the junction formed between the n-type graded portion of the drain region and the p-type in-situ doped region, and the p-type in-situ doped region enhances a second impact ionization that creates another electron/hole pair within the p-type portion of the junction on the drain side, wherein the electron generated from the second impact ionization can get injected up into a storage medium of the gate stack structure.
19. The method of claim 1 , wherein the gate stack structure includes gate electrode overlying a dielectric layer.
20. The method of claim 1 , wherein the gate stack structure includes, gate electrode overlying a charge storage layer.
21. The method of claim 1 , wherein the gate stack structure includes a gate electrode overlying a top dielectric layer, the top dielectric layer overlying a charge storage layer, and the charge storage layer overlying a bottom dielectric layer.
22. A method of forming a portion of a non-volatile memory cell, comprising:
providing a substrate;
forming a gate stack structure overlying the substrate;
forming a source region adjacent the gate stack structure by;
removing a first portion of the substrate adjacent the gate stack structure; and
epitaxially growing a first semiconductor material to replace the removed first portion of the substrate; and
forming a graded in-situ doped drain region adjacent the gate stack structure and on a side opposite that of the source region by;
removing a second portion of the substrate adjacent the gate stack structure on the side opposite the source region; and
epitaxially growing silicon germanium to replace the second portion, wherein the first semiconductor material is different from silicon germanium.
23. A method of forming a portion of a semiconductor device comprising:
providing a p-type substrate;
forming a gate stack structure overlying the substrate;
forming a source region adjacent the gate stack structure by;
removing a first portion of the substrate adjacent the gate stack structure; and
epitaxially growing a first semiconductor material to replace the removed first portion of the substrate; and
forming a graded n-type in-situ doped drain region adjacent the gate stack structure and on a side opposite that of the source region, wherein the graded in-situ doped drain region includes a dopant concentration profile configured to enhance a band to band hole generation, further wherein forming the graded in-situ doped drain region includes one or more of providing a portion thereof having a substantially constant dopant profile, linearly grading a portion of the dopant profile of the graded in-situ doped drain region, non-linearly grading a portion of the dopant profile of the graded in-situ doped drain region, or step grading a portion of the dopant profile of the graded in-situ doped drain region by;
removing a second portion of the substrata adjacent the gate stack structure on the side opposite the source region; and
epitaxially growing silicon germanium to replace the second portion, wherein the first semiconductor material is different from silicon germanium.
24. The method of claim 23 , further comprising:
forming a p-type in-situ doped region prior to forming the graded n-type in-situ doped drain region, wherein the p-type in-situ doped region and n-type region together form a junction on a drain side of the semiconductor device, further wherein the p-type in-situ doped region comprises a material that can be epitaxially grown on the substrate.
25. The method of claim 24 , wherein the graded n-type in-situ doped drain region and the p-type in-situ doped region each comprise a material having a bandgap that is smaller than a bandgap of a material of the substrate, and wherein during device operation, the graded n-type in-situ doped drain region enhances a first impact ionization that creates an electron/hole pair within the drain region, wherein a hole generated from the first impact ionization accelerates and traverses the junction formed between the n-type graded portion of the drain region and the p-type in-situ doped region, and the p-type in-situ doped region enhances a second impact ionization that creates another electron/hole pair within the p-type portion of the junction on the drain side, wherein the electron generated from the second impact ionization can get injected up into a storage medium of the gate stack structure.