Composite tantalum nitride/tantalum copper capping layer
View Patent ↗Electromigration and stress migration of Cu interconnects are significantly reduced by forming a composite capping layer comprising a layer of tantalum nitride on the upper surface of the inlaid Cu and a layer of α-Ta on the titanium nitride layer. Embodiments include forming a recess in an upper surface of an upper surface of Cu inlaid in a dielectric layer, depositing a layer of titanium nitride of a thickness of 20 Å to 100 Å and then depositing a layer of α-Ta at a thickness of 200 Å to 500 Å.
1. A semiconductor device comprising:
a first dielectric layer over a substrate;
copper (Cu) or a Cu alloy inlaid in the first dielectric layer; and
a composite capping layer on the inlaid Cu or Cu alloy; the composite capping layer comprising:
a layer of tantalum nitride on the inlaid Cu or Cu alloy; and
a layer of alpha (α)-Ta on the layer of tantalum nitride, wherein:
the inlaid Cu or Cu alloy has an upper surface; and
the composite capping layer encapsulates the inlaid Cu or Cu alloy along its entire upper surface.
2. The semiconductor device according to claim 1 , wherein the composite capping layer is formed in a recess in the inlaid Cu or Cu alloy such that an upper surface of the α-Ta layer is substantially coplanar with an upper surface of the first dielectric layer.
3. The semiconductor device according to claim 2 , wherein:
the tantalum nitride layer has a thickness of 20 Å to 100 Å; and
the α-Ta layer has a thickness of 200 Å to 500 Å.
4. The semiconductor device according to claim 3 , further comprising:
a second dielectric layer, having an opening therein, over the first dielectric layer; and
a Cu or Cu alloy inlaid in the opening in the second dielectric layer in electrical contract with the upper surface of the α-Ta layer.
5. The semiconductor device according to claim 4 , further comprising an α-Ta diffusion barrier lining the opening in the second dielectric layer.
6. The semiconductor device according to claim 4 , wherein the opening is a dual damascene opening, the Cu or Cu alloy forming an interconnect comprising a lower via section and upper line.
7. The semiconductor device according to claim 2 , further comprising: a diffusion barrier layer lining an opening in the first dielectric layer; and
the Cu or Cu alloy inlaid in the opening.
8. The semiconductor device according to claim 1 , wherein:
the tantalum nitride layer has a thickness of 20 Å to 100 Å; and
the α-Ta layer has a thickness of 200 Å to 500 Å.
9. The semiconductor device according to claim 1 , wherein the layer of tantalum nitride is bonded to the upper surface of the inlaid Cu or Cu alloy at an interface containing Ta unreacted with the tantalum nitride.
10. A method of manufacturing a semiconductor device, the method comprising: forming an opening in a first dielectric layer;
filling the opening with copper (Cu) or a Cu alloy; and
forming a composite capping layer on an upper surface of the Cu or Cu alloy, the composite capping layer comprising:
a layer of tantalum nitride on the upper surface of the Cu or Cu alloy; and
a layer of alpha (α)-Ta on the layer of tantalum nitride, wherein
the composite capping layer encapsulates the Cu or Cu alloy along its entire upper surface.
11. The method according to claim 10 , comprising:
forming a recess in the upper surface of the Cu or Cu alloy before forming the composite capping layer; and
chemical mechanical polishing (CMP) such that an upper surface of the α-Ta layer is substantially coplanar with an upper surface of the first dielectric layer.
12. The method according to claim 11 , comprising forming a diffusion barrier layer lining the opening before filling the opening with Cu or Cu alloy.
13. The method according to claim 11 , comprising:
forming the tantalum nitride at a thickness of 20 Å to 100 Å; and
forming the α-Ta layer at a thickness of 200 Å to 500 Å.
14. The method according to claim 11 , comprising depositing the tantalum nitride and α-Ta layers by physical vapor deposition (PVD).
15. The method according to claim 11 , comprising:
forming a second dielectric layer over the first dielectric layer;
forming an opening in the second dielectric layer; and
filling the opening in the second dielectric layer with Cu or Cu alloy in electrical contact with the upper surface of the α-Ta layer.
16. The method according to claim 15 , comprising lining the opening of the second dielectric layer with an α-Ta diffusion barrier before filling the opening with Cu or a Cu alloy.
17. The method according to claim 10 , comprising:
forming the tantalum nitride layer at a thickness of 20 Å to 100 Å; and
forming the α-Ta layer at a thickness of 200 Å to 500 Å.
18. The method according to claim 15 , comprising:
forming the opening in the second dielectric layer as a dual damascene opening; and
filling the dual damascene opening with Cu or Cu alloy to form a interconnect comprising a lower via section in contact with an upper line.
19. The method according to claim 10 , comprising depositing the layer of tantalum nitride under conditions wherein free Ta is generated, which free Ta participates in bonding the layer of tantalum nitride to the upper surface of the inlaid Cu or Cu alloy.