Semiconductor device having conductive spacers in sidewall regions and method for forming
View Patent ↗A conductive spacer ( 36, 122 ) in a sidewall region ( 30, 16 ) of a device ( 10, 100 ) is formed. The conductive spacer is formed adjacent sidewalls of the current electrode regions ( 18, 12 ). In one embodiment, a thin silicide layer ( 34 ) is formed at a top surface and a sidewall of the current electrode regions followed by an anisotropic etch of the conductive layer ( 32 ) used to form the thin silicide layer. The anisotropic etch of the conductive layer results in conductive spacers ( 36 ) adjacent sidewalls of the current electrode regions where these conductive spacers may allow for reduced contact resistance thus improving device performance. The conductive spacers may be formed adjacent current electrode regions of a MOSFET device, FINFET device, bipolar device, or Shotky-Barrier device.
1. A process for forming a metal spacer in a sidewall region of a semiconductor device, comprising:
forming the sidewall region adjacent to a current electrode region of the semiconductor device;
forming, in the sidewall region, a metal layer over a substrate;
reacting a portion of the metal layer to form an etch stop layer at an interface between the metal layer and the substrate;
etching a portion of the metal layer; and
using the etch stop layer as an etch stop during said step of etching in order to form a metal spacer in the sidewall region.
2. A process as in claim 1 , wherein the etch stop layer comprises one selected from a group consisting of asilicide layer and a germanicide layer.
3. A process as in claim 1 , wherein the current electrode region comprises a source/drain region.
4. A process as in claim 1 , further comprising:
forming a second metal layer overlying the metal spacer.
5. A process as in claim 4 , wherein said step of forming a second metal layer comprises:
using the metal spacer as a seed in an electroless plating process to grow the second metal layer.
6. A process as in claim 1 , wherein the semiconductor device comprises a MOSFET.
7. A process as in claim 1 , wherein the semiconductor device comprises a FINFET.
8. A process as in claim 1 , wherein the substrate comprises a dielectric layer.
9. A process as in claim 8 , further comprising:
before said step of forming the metal layer, etching the dielectric layer in the sidewall region.
10. A process as in claim 8 , wherein a sidewall in the sidewall region has a first portion adjacent to the current electrode region and has a second portion adjacent to the dielectric layer.
11. A process as in claim 1 , wherein the metal layer comprises one selected from a group consisting of a cobalt layer, a tungsten layer, a nickel layer, a palladium layer, a platinum layer, and a ruthenium layer.
12. A process for forming a conductive spacer in a sidewall region of a semiconductor device, comprising:
forming a current electrode of the semiconductor device in a substrate;
forming a sidewall adjacent to the current electrode of the semiconductor device;
forming a conductive layer overlying the substrate and adjacent to the sidewall;
reacting a portion of the conductive layer to form an etch stop layer at an interface between the conductive layer and the substrate;
etching a portion of the conductive layer; and
using the etch stop layer as an etch stop during said step of etching in order to form a conductive spacer adjacent to the sidewall.
13. A process as in claim 12 , wherein the etch stop layer comprises one selected from a group consisting of a suicide layer and a germanicide layer.
14. A process as in claim 12 , wherein the conductive layer comprises a first metal layer, the process further comprising:
forming a second metal layer overlying the conductive spacer.
15. A process as in claim 14 , wherein said step of forming a second metal layer comprises:
using the conductive spacer as a seed in an electroless plating process to grow the second metal layer.
16. A process as in claim 12 , wherein the semiconductor device is a FINFET.
17. A process as in claim 12 , wherein the substrate comprises a dielectric layer, the process further comprising:
before said step of forming the conductive layer, etching the dielectric layer.
18. A process as in claim 17 , wherein the sidewall has a first portion adjacent to the current electrode and has a second portion adjacent to the dielectric layer.
19. A process as in claim 12 , wherein the conductive layer comprises one selected from a group consisting of a cobalt layer, a tungsten layer, a nickel layer, a palladium layer, a platinum layer, and a ruthenium layer.
20. A process for forming a metal spacer in a sidewall region of a semiconductor device, comprising:
providing a substrate having a dielectric layer;
forming a current electrode region of the semiconductor device overlying the substrate;
etching the dielectric layer to form a sidewall having a first portion adjacent to the current electrode region and having a second portion adjacent to the dielectric layer;
forming a metal layer overlying the substrate and adjacent to the sidewall;
reacting a portion of the metal layer to form an etch stop layer at an interface between the metal layer and the substrate;
etching a portion of the metal layer; and
using the etch stop layer as an etch stop during said step of etching in order to form a metal spacer adjacent to the sidewall.