Reverse tone patterning on surfaces having planarity perturbations
View Patent ↗The present invention features a method of patterning a substrate that includes forming, on the substrate, a first film having an original pattern that includes a plurality of projections a subset of which extends from a nadir surface terminating in an apex surface defining a height therebetween. A second film is disposed upon the first film and defines a surface spaced-apart from the apex surface of the plurality of projections. A variation in a distance between the apex surface of any one of the plurality of projections and the surface being within a predetermined range. A recorded pattern is transferred onto the substrate that corresponds to the original pattern, within the predetermined range being selected to minimize pattern distortions in the recorded pattern.
1. A method of patterning a substrate having surface planarity perturbations, said method comprising:
forming, on said substrate, a first film having an original pattern that includes a plurality of projections a subset of which extends from a nadir surface terminating in an apex surface defining a height therebetween;
disposing, upon said first film, a second film defining a normalization surface spaced-apart from said apex surface of said plurality of projections, with a variation in a distance between said apex surface of any one of said plurality of projections and said normalization surface being within a predetermined range; and
transferring onto said substrate, a recorded pattern corresponding to said original pattern, with said predetermined range being selected to minimize pattern distortions in said recorded pattern.
2. The method as recited in claim 1 wherein forming further includes forming said second film to provide said variation that is less than ½ said height.
3. The method as recited in claim 1 wherein forming further includes forming said first film to provide said subset of projections with a shoulder disposed between said apex surface and said nadir surface.
4. The method as recited in claim 1 wherein transferring further includes selectively removing portions of said first and second films to expose portions of said substrate in superimposition with said projections while avoiding exposure of areas of said substrate outside of said portions.
5. The method as recited in claim 1 wherein disposing further includes providing said normalization surface with a smooth profile.
6. The method as recited in claim 1 wherein disposing further includes providing said normalization surface with a planar profile.
7. The method as recited in claim 1 wherein forming further includes providing said first film with a first etch rate and disposing further includes providing said second film with a second etch rate, and transferring further including removing one of said first and second films uniformly over a volume thereof.
8. The method as recited in claim 1 wherein forming further includes forming said first film with a first substantially free of silicon and depositing further includes providing said second film with a quantity of silicon.
9. The method as recited in claim 1 wherein forming further includes forming said first film using a deposition process selected from a set of deposition processes consisting essentially of chemical vapor deposition, plasma enhanced chemical vapor deposition, spin coating, atomic layer deposition, drop dispense imprinting, and electron beam pattern.
10. The method as recited in claim 9 wherein depositing further includes depositing said second film using a deposition process selected from a set of deposition processes consisting essentially of chemical vapor deposition, plasma enhanced chemical vapor deposition, spin coating, atomic layer deposition, drop dispense imprinting, and electron beam patterning.
11. The method as recited in claim 1 wherein said substrate includes a featured region, with forming further including forming said first film upon said featured region.
12. The method as recited in claim 1 wherein forming further includes forming said first film from an organic acrylate material defining a nadir region in superimposition with said nadir surface and further including removing said nadir region, with disposing further including, after removing said nadir region, depositing a dielectric material to form said second film therefrom, with transferring further including removing said organic acrylate material and portions of said dielectric material in superimposition therewith to leave a plurality of spaced-apart regions of said dielectric material on said substrate, defining said recorded pattern.
13. The method as recited in claim 1 wherein forming further includes forming said first film from an organic acrylate material defining a nadir region in superimposition with said nadir surface and further including removing said nadir region, with disposing further including, after removing said nadir region, depositing a conductive material to form said second film therefrom, with transferring further including removing said organic acrylate material and portions of said conductive material in superimposition therewith to leave a plurality of spaced-apart regions of said conductive material on said substrate, defining said recorded pattern.
14. The method as recited in claim 1 wherein forming further includes depositing said first film with a nadir region, in superimposition with said nadir surface, having a thickness associated therewith that is approximately equal to said height.
15. The method as recited in claim 1 wherein forming further includes depositing said first film with a nadir region, in superimposition with said nadir surface, having a thickness associated therewith that is greater than said height.
16. The method as recited in claim 1 wherein forming further includes depositing said first film with a nadir region, in superimposition with said nadir surface, having a thickness associated therewith that is two times greater than said height.
17. The method as recited in claim 1 wherein forming further includes depositing said first film with a nadir region, in superimposition with said nadir surface, having a thickness associated therewith that is ten times greater than said height.
18. A method of patterning a substrate having surface planarity perturbations, said method comprising:
forming, on said substrate, a first film having an original pattern that includes a plurality of projections a subset of which extends from a nadir surface terminating in an apex surface defining a height therebetween;
disposing, upon said first film, a second film defining a normalization surface spaced-apart from said apex surface of said plurality of projections, with a variation in a distance between said apex surface of any one of said plurality of projections and said surface being less than ½ said height; and
transferring onto said substrate, a recorded pattern corresponding to said original pattern by selectively removing portions of said first and second films to expose portions of said substrate in superimposition with said projections while avoiding exposing areas said substrate outside of said portions.
19. The method as recited in claim 18 wherein forming further includes forming said first film to provide said subset of projections with a shoulder disposed between said apex surface and said nadir.
20. The method as recited in claim 18 wherein forming further includes forming said first film with a first substantially free of silicon and depositing further includes providing said second film with a quantity of silicon.
21. The method as recited in claim 18 wherein forming further includes forming said first film using a deposition process selected from a set of deposition processes consisting essentially of chemical vapor deposition, plasma enhanced chemical vapor deposition, spin coating, atomic layer deposition, drop dispense imprinting, and electron beam pattern.
22. The method as recited in claim 21 wherein depositing further includes depositing said second film using a deposition process selected from a set of deposition processes consisting essentially of chemical vapor deposition, plasma enhanced chemical vapor deposition, spin coating, atomic layer deposition, drop dispense imprinting, and electron beam patterning.
23. The method as recited in claim 18 wherein said substrate includes a featured region, with forming further including forming said first film upon said featured region.
24. The method as recited in claim 23 wherein forming further includes depositing said first film with a nadir region, in superimposition with said nadir surface, having a thickness associated therewith that is approximately equal to said height.
25. The method as recited in claim 23 wherein forming further includes depositing said first film with a nadir region, in superimposition with said nadir surface, having a thickness associated therewith that is greater than said height.
26. The method as recited in claim 23 wherein forming further includes depositing said first film with a nadir region, in superimposition with said nadir surface, having a thickness associated therewith that is two times greater than said height.
27. The method as recited in claim 23 wherein forming further includes depositing said first film with a nadir region, in superimposition with said nadir surface, having a thickness associated therewith that is ten times greater than said height.
28. The method as recited in claim 18 wherein forming further includes forming said first film from an organic acrylate material defining a nadir region in superimposition with said nadir surface and further including removing said nadir region, with disposing further including, after removing said nadir region, depositing a dielectric material to form said second film therefrom, with transferring further including removing said organic acrylate material and portions of said dielectric material in superimposition therewith to leave a plurality of spaced-apart regions of said dielectric material on said substrate, defining said recorded pattern.
29. The method as recited in claim 18 wherein forming further includes forming said first film from an organic acrylate material defining a nadir region in superimposition with said nadir surface and further including removing said nadir region, with disposing further including, after removing said nadir region, depositing a conductive material to form said second film therefrom, with transferring further including removing said organic acrylate material and portions of said conductive material in superimposition therewith to leave a plurality of spaced-apart regions of said conductive material on said substrate, defining said recorded pattern.
30. A method of patterning a substrate having surface planarity perturbations, said method comprising:
forming, on a section of said substrate having planarity perturbations, a first film having an original pattern that includes a plurality of projections a subset of which extends from a nadir surface terminating in an apex surface defining a height therebetween, with shoulders being disposed between said apex surface and said nadir surface;
disposing, upon said first film, a second film defining a normalization surface spaced-apart from said apex surface of said plurality of projections, with a variation in a distance between said apex surface of any one of said plurality of projections and said surface being less than ½ said height; and
transferring onto said substrate, a recorded pattern corresponding to said original pattern by selectively removing portions of said first and second films to expose portions of said substrate in superimposition with said projections while avoiding exposing areas said substrate outside of said portions.
31. The method as recited in claim 30 wherein forming further includes depositing said first film with a nadir region, in superimposition with said nadir surface, having a thickness associated therewith that is greater than said height.
32. The method as recited in claim 31 wherein forming further includes forming said first film with a first substantially free of silicon and depositing further includes providing said second film with a quantity of silicon.
33. The method as recited in claim 31 wherein forming further includes forming said first film from an organic acrylate material defining a nadir region in superimposition with said nadir surface and further including removing said nadir region, with disposing further including, after removing said nadir region, depositing a dielectric material to form said second film therefrom, with transferring further including removing said organic acrylate material and portions of said dielectric material in superimposition therewith to leave a plurality of spaced-apart regions of said dielectric material on said substrate, defining said recorded pattern.
34. The method as recited in claim 31 wherein forming further includes forming said first film from an organic acrylate material defining a nadir region in superimposition with said nadir surface and further including removing said nadir region, with disposing further including, after removing said nadir region, depositing a conductive material to form said second film therefrom, with transferring further including removing said organic acrylate material and portions of said conductive material in superimposition therewith to leave a plurality of spaced-apart regions of said conductive material on said substrate, defining said recorded pattern.
35. The method as recited in claim 30 wherein forming further includes depositing said first film with a nadir region, in superimposition with said nadir surface, having a thickness associated therewith that is approximately equal to said height.