Phase change memory with damascene memory element
View Patent ↗A phase change material may be formed within a trench in a first layer to form a damascene memory element and in an overlying layer to form a threshold device. Below the first layer may be a wall heater. The wall heater that heats the overlying phase change material may be formed in a U-shape in some embodiments of the present invention. The phase change material for the memory element may be elongated in one direction to provide greater alignment tolerances with said heater and said threshold device.
1. An apparatus comprising:
a wall heater;
a damascene phase change memory element on said wall heater; and
a pair of transverse conductors and an elongated phase change material between said pair of conductors, said material being elongated in the direction of one of said conductors.
2. The apparatus of claim 1 wherein said wall heater is U-shaped including an upstanding arm in contact with said elongated phase change material.
3. The apparatus of claim 1 including a threshold device over said elongated phase change material.
4. The apparatus of claim 3 wherein said threshold device includes a chalcogenide material.
5. The apparatus of claim 3 including a threshold device including a chalcogenide material that does not change phase.
6. The apparatus of claim 3 including a threshold device formed within a dielectric layer over said elongated phase change material.
7. The apparatus of claim 1 including a dielectric layer with an opening, said elongated phase change material formed in said opening.
8. The apparatus of claim 7 including a second dielectric layer having an opening, said heater formed in said opening in said second dielectric layer, said second dielectric layer being below said first dielectric layer.
9. The apparatus of claim 1 wherein elongated phase change material is oval in shape.
10. A system comprising:
a controller;
a wireless interface coupled to said controller; and
a phase change memory coupled to said controller including a wall heater and a damascene phase change memory element on said wall heater, said memory including a pair of transverse conductors and an elongated phase change material between said pair of conductors, said material being elongated in the direction of one of said conductors.
11. The system of claim 10 wherein said wall heater is U-shaped including an upstanding arm in contact with said elongated phase change material.
12. The system of claim 10 including a threshold device over said elongated phase change material.
13. The system of claim 12 wherein said threshold device includes a chalcogenide material.
14. The system of claim 12 including a threshold device including a chalcogenide material that does not change phase.
15. The system of claim 12 including a threshold device formed with a dielectric layer over said elongated phase change material.
16. The system of claim 10 including a dielectric layer with an opening, said elongated phase change material formed in said opening.
17. The system of claim 16 including a second dielectric layer having an opening, said heater formed in said opening in said second dielectric layer, said second dielectric layer being below said first dielectric layer.
18. The system of claim 10 wherein said elongated phase change material is oval in shape.
19. The system of claim 10 wherein said wireless interface includes a dipole antenna.
20. An apparatus comprising:
a U-shaped heater including a pair of upstanding arms extending away from a base;
a damascene phase change memory element coupled to one of said arms; and
a pair of transverse conductors and an elongated phase change material between said pair of conductors, said material being elongated in the direction of one of said conductors.
21. The apparatus of claim 20 including a threshold device over said elongated phase change material.
22. The apparatus of claim 21 wherein said threshold device includes a chalcogenide material.
23. The apparatus of claim 21 wherein said threshold device includes a chalcogenide material that does not change phase.
24. The apparatus of claim 21 wherein said threshold device is formed within a dielectric layer over said elongated phase change material.
25. The apparatus of claim 20 including a dielectric layer with an opening, said elongated phase change material formed in said opening.
26. The apparatus of claim 25 including a second dielectric layer having an opening, said heater formed in said opening in said second dielectric layer, said second dielectric layer being below said first dielectric layer.
27. The apparatus of claim 20 wherein elongated phase change material is oval in shape.