Exposure apparatus and method for forming fine patterns of semiconductor device using the same
View Patent ↗Disclosed are an exposure apparatus for forming fine patterns of a semiconductor using an electric field and a method for forming fine patterns using the exposure apparatus. The exposure apparatus comprises an electric field generator for generating an electric field to be applied to infiltrate an acid (H + ) produced when a photoresist film is exposed into non-exposure regions. Non-exposure regions into which an acid is infiltrated along with exposure regions in a development process can be removed by applying an electric field to the acid produced during exposure of a photoresist film such that the acid is infiltrated into the non-exposure regions.
1. A method for forming fine patterns of a semiconductor device in a development process, comprising:
applying an electric field, while rotating a wafer, laterally across a horizontal surface of an exposed photoresist film on the wafer to infiltrate acid into non-exposure regions of the photoresist and form an acid-infiltrated non exposure region to a width sufficient to reduce a width of a subsequently developed pattern: and
removing the acid-infiltrated non-exposure region along with exposure regions.
2. The method of claim 1 , further comprising forming the photoresist film by applying a photoresist agent for deep ultraviolet (DUV) to the wafer.
3. The method of claim 1 , wherein the electric field comprises changing the electric field periodically.
4. A method for forming fine patterns of a semiconductor device, comprising:
forming a photoresist film on a wafer;
exposing the photoresist film by irradiating a mask on which patterns are formed;
infiltrating an acid generated in exposure regions of the photoresist film into non-exposure regions by applying an electric field to the acid laterally across a horizontal surface of the wafer while rotating the wafer, and forming a non-exposure region into which the acid is infiltrated to a width sufficient to reduce a width of a subsequently developed pattern; and
removing the exposure regions and the non-exposure regions into which the acid is infiltrated by developing the exposure regions and the non-exposure regions.
5. The method of claim 4 , wherein the photoresist film is formed by applying a photoresist agent for deep ultraviolet (DCV) to the wafer.
6. The method of claim 4 , wherein applying the electric field comprises changing the electric field periodically.
7. The method of claim 4 , wherein the non-exposure region into which acid is infiltrated has a uniform width.
8. The method of claim 4 , wherein the developed regions have a width less than a width of respective light shield patterns.
9. The method of claim 4 , wherein removing the non-exposure region into which acid is infiltrated comprises developing the photoresist.
10. The method of claim 4 , further comprising applying the electric field to the wafer after the photoresist film on the wafer is exposed and before removing the non-exposure regions into which acid is infiltrated along with exposure regions.
11. The method of claim 1 , wherein the acid-infiltrated non-exposure region has a uniform width.
12. The method of claim 1 , wherein the developed regions have a width less than a width of respective light shield patterns.
13. The method of claim 1 , wherein removing the acid-infiltrated non-exposure region comprises developing the photoresist.
14. The method of claim 1 , further comprising applying the electric field to the wafer after the photoresist film on the wafer is exposed and before removing the acid-infiltrated non-exposure regions along with exposure regions.