Magnetoresistive random access memory device structures and methods for fabricating the same
View Patent ↗Magnetoelectronic memory element structures and methods for making such structures using a barrier layer as a material removal stop layer are provided. The methods comprise forming a digit line disposed at least partially within a dielectric layer. The dielectric material layer overlies an interconnect stack. A void space is etched in the dielectric layer to expose the interconnect stack. A conductive-barrier layer having a first portion and a second portion is deposited. The first portion overlies the digit line and the second portion is disposed within the void space and in electrical communication with the interconnect stack. A memory element layer is formed overlying the first portion and an electrode layer is deposited overlying the memory element layer. The electrode layer and the memory element layer are then patterned and etched.
1. A method for fabricating a magnetoelectronic memory element structure, the method comprising:
fabricating an interconnect stack in electrical communication with at least one transistor;
forming a digit line disposed at least partially within a first dielectric material layer, said first dielectric material layer overlying said interconnect stack;
etching a void space in said first dielectric material layer to expose said interconnect stack;
depositing a conductive barrier layer having a first portion and a second portion, said first portion of said conductive barrier layer overlying said digit line and said second portion of said conductive barrier layer disposed within said void space and in electrical communication with said interconnect stack;
forming a magnetic memory element layer overlying said first portion of said conductive barrier layer;
depositing an electrode layer overlying said magnetic memory element layer;
patterning and etching said electrode layer to form an electrode overlying said digit line; and
patterning and etching said magnetic memory element layer wherein the step of patterning and etching said electrode layer to form an electrode overlying said digit line is performed before the step of and etching said magnetic memory element layer.
2. The method for fabricating a magnetoelectronic memory element structure of claim 1 , the step of depositing said conductive barrier layer comprising the step of depositing a layer comprising at least one material selected from the group consisting of tantalum, tantalum nitride, titanium, titanium nitride, tungsten, and tungsten nitride.
3. The method for fabricating a magnetoelectronic memory element structure of claim 1 , further comprising the step of depositing a fill material overlying said first portion and said second portion of said conductive barrier layer before the step of forming a magnetic memory element layer.
4. The method for fabricating a magnetoelectronic memory element structure of claim 3 , further comprising the step of removing a portion of said fill material overlying said first portion of said conductive barrier layer before the step of forming a magnetic memory element layer.
5. The method for fabricating a magnetoelectronic memory element structure of claim 4 , wherein the step of removing a portion of said fill material is performed by chemical mechanical polishing.
6. The method for fabricating a magnetoelectronic memory element structure of claim 3 , wherein the step of depositing a fill material comprises the step of depositing a dielectric material.
7. The method for fabricating a magnetoelectronic memory element structure of claim 3 , wherein the step of depositing a fill material comprises the step of depositing a conductive material.
8. The method for fabricating a magnetoelectronic memory element structure of claim 7 , wherein the step of depositing a conductive material comprises the step of depositing copper.
9. The method for fabricating a magnetoelectronic memory element structure of claim 7 , wherein the step of patterning and etching said magnetic memory element layer comprises the step of patterning and etching said magnetic memory element layer so that said magnetic memory element layer underlies said electrode and substantially overlies said fill material and said second portion of said conductive barrier layer.
10. The method for fabricating a magnetoelectronic memory element structure of claim 9 , wherein the step of patterning and etching said magnetic memory element layer comprises the step of patterning and etching said magnetic memory element layer so that said magnetic memory element layer underlies said electrode, overlies said fill material and said second portion of said conductive barrier layer, and extends beyond said fill material and said second portion of said conductive barrier layer.
11. The method for fabricating a magnetoelectronic memory element structure of claim 1 , the step of forming a magnetic memory element layer overlying said first portion of said conductive barrier layer further comprising the step of forming said magnetic memory element layer overlying said second portion of said conductive barrier layer and within said void space.
12. The method for fabricating a magnetoelectronic memory element structure of claim 11 , the step of depositing an electrode layer overlying said magnetic memory element layer comprising the step of depositing said electrode layer within said void space.
13. The method for fabricating a magnetoelectronic memory element structure of claim 12 , further comprising the step of removing a portion of said magnetic memory element layer and a portion of said electrode layer that overlie said first dielectric material and that do not overlie said digit line.
14. The method for fabricating a magnetoelectronic memory element structure of claim 13 , wherein the step of removing said portion of said magnetic memory element layer and said portion of said electrode layer is performed by etching.
15. The method for fabricating a magnetoelectronic memory element structure of claim 1 , further comprising the step of depositing a capping layer overlying said digit line after the step of forming said digit line.
16. The method for fabricating a magnetoelectronic memory element structure of claim 1 , further comprising the step of depositing a second dielectric material layer overlying said digit line after the step of forming said digit line, said second dielectric material layer functioning as an etch stop during the step of patterning and etching said magnetic memory element layer.