Method of making an organic memory cell
View Patent ↗A method of making an organic memory cell which comprises two electrodes with a controllably conductive media between the two electrodes is disclosed. The present invention involves providing a dielectric layer having formed therein one or more first electrode pads; removing a portion of the first electrode pad to form a recessed area on top of the pads and in the dielectric layer using reverse electroplating; forming a controllably conductive media over the first electrode pad in the recessed area; and forming a second electrode over the conductive media. The controllably conductive media contains an organic semiconductor layer and a passive layer.
1. A method of making an organic memory cell comprising:
providing a dielectric layer having formed therein one or more first electrode pads;
removing a portion of the first electrode pad to form a recessed area on top of the first electrode pad and in the dielectric layer using reverse electroplating;
forming a controllably conductive media comprising an organic semiconductor material and a passive layer over the electrode pad and in the recessed area; and
providing a second electrode over the controllably conductive media.
2. The method of claim 1 , wherein the reverse electroplating is performed using phosphoric acid electrolytes, nitric acid electrolytes, or organic acid electrolytes.
3. The method of claim 1 , further comprising forming a mask over portions of the dielectric layer before removing the portion of the first electrode pad.
4. The method of claim 1 , further comprising forming a mask over portions of the dielectric layer after removing the portion of the first electrode pad.
5. The method of claim 1 , wherein the recessed area on top of the first electrode pads in the dielectric layer has a depth of about 0.01 μm or more and about 25 μm or less.
6. The method of claim 1 , wherein the organic semiconductor material comprises at least one selected from the group consisting of polyacetylene; polydiphenylacetylene; poly(t-butyl)diphenylacetylene; poly(trifluoromethyl)diphenylacetylene; polybis(trifluoromethyl)acetylene; polybis(t-butyldiphenyl)acetylene; poly(trimethylsilyl) diphenylacetylene; poly(carbazole)diphenylacetylene; polydiacetylene; polyphenylacetylene; polypyridineacetylene; polymethoxyphenylacetylene; polymethylphenylacetylene; poly(t-butyl)phenylacetylene; polynitro-phenylacetylene; poly(trifluoromethyl)phenylacetylene; poly(trimethylsilyl)pheylacetylene; polydipyrrylmethane; polyindoqiunone; polydihydroxyindole; polytrihydroxyindole; furane-polydihydroxyindole; polyindoqiunone-2-carboxyl; polyindoqiunone; polybenzobisthiazole; poly(p-phenylene sulfide); polyaniline; polythiophene; polypyrrole; polysilane; polystyrene; polyfuran; polyindole; polyazulene; polyphenylene; polypyridine; polybipyridine; polyphthalocyanine; polysexithiofene; poly(siliconoxohemiporphyrazine); poly(germaniumoxohemiporphyrazine); poly(ethylenedioxythiophene); polymetallocene complexes; and polypyridine metal complexes.
7. The method of claim 1 , wherein the first electrode and second electrode independently comprise at least one selected from the group consisting of aluminum, chromium, copper, germanium, gold, magnesium, manganese, indium, iron, nickel, palladium, platinum, silver, titanium, zinc, and alloys thereof; indium-tin oxide; and metal silicides.
8. The method of claim 1 , wherein the organic semiconductor layer has a thickness of about 0.001 μm or more and about 5 μm or less and the passive layer has a thickness of about 2 Å or more and about 0.1 μm or less.
9. The method of claim 1 , wherein the second electrode is formed in the recessed area in the dielectric layer.
10. A method of making an organic memory cell comprising:
providing a dielectric layer having formed therein one or more first electrode pads, at least one of the first electrode pads comprising at least copper;
removing a portion of the pad to form a recessed area on top of the first electrode pad and in the dielectric layer using reverse electroplating;
forming a copper sulfide region over the first electrode pad and in the recessed area;
forming an organic semiconductor layer over the copper sulfide region in the recessed area, the organic semiconductor layer comprising at least one of a conjugated organic polymer, a conjugated organometallic compound, a conjugated organometallic polymer, a buckyball, and a carbon nanotube; and
forming a second electrode over the organic semiconductor layer.
11. The method of claim 10 , wherein forming a copper sulfide region is performed by contacting a sulfide compound with the first electrode.
12. The method of claim 11 , wherein the sulfide compound is contacted with the first electrode for a time from about 1 second to about 3 minutes at a temperature from about 150° C. to about 500° C.
13. The method of claim 10 , wherein the reverse electroplating is performed using phosphoric acid electrolytes, nitric acid electrolytes, or organic acid electrolytes.
14. The method of claim 10 , further comprising forming a mask over portions of the dielectric layer before removing the portion of the first electrode pad.
15. The method of claim 10 , further comprising forming a mask over portions of the dielectric layer after removing the portion of the first electrode pad.
16. The method of claim 10 , wherein the recessed area on top of the first electrode pads in the dielectric layer has a depth of about 0.01 μm or more and about 25 μm or less.
17. The method of claim 10 , wherein the organic semiconductor layer comprises at least one selected from the group consisting of polyacetylene; polydiphenylacetylene; poly(t-butyl)diphenylacetylene; poly(trifluoromethyl)diphenylacetylene; polybis(trifluoromethyl)acetylene; polybis(t-butyldiphenyl)acetylene; poly(trimethylsilyl) diphenylacetylene; poly(carbazole)diphenylacetylene; polydiacetylene; polyphenylacetylene; polypyridineacetylene; polymethoxyphenylacetylene; polymethylphenylacetylene; poly(t-butyl)phenylacetylene; polynitro-phenylacetylene; poly(trifluoromethyl)phenylacetylene;
poly(trimethylsilyl)pheylacetylene; polydipyrrylmethane;
polyindoqiunone; polydihydroxyindole; polytrihydroxyindole; furane-polydihydroxyindole; polyindoqiunone-2-carboxyl; polyindoqiunone; polybenzobisthiazole; poly(p-phenylene sulfide); polyaniline; polythiophene; polypyrrole; polysilane; polystyrene; polyfuran; polyindole; polyazulene; polyphenylene; polypyridine; polybipyridine; polyphthalocyanine; polysexithiofene; poly(siliconoxohemiporphyrazine); poly(germaniumoxohemiporphyrazine); poly(ethylenedioxythiophene); polymetallocene complexes; and polypyridine metal complexes.
18. The method of claim 10 , wherein the second electrode and second electrode independently comprise at least one selected from the group consisting of aluminum, chromium, copper, germanium, gold, magnesium, manganese, indium, iron, nickel, palladium, platinum, silver, titanium, zinc, and alloys thereof; indium-tin oxide; and metal silicides.
19. The method of claim 10 , wherein the organic semiconductor layer has a thickness of about 0.001 μm or more and about 5 μm or less and the passive layer has a thickness of about 2 Å or more and about 0.1 μm or less.
20. The method of claim 10 , wherein the second electrode is formed in the recessed area in the dielectric layer.