Method for forming isolation film in semiconductor device
View Patent ↗A method for forming an isolation film of a semiconductor device is disclosed which includes forming trenches in a semiconductor substrate, forming a first HDP oxide film in the formed trenches, performing an etch-back process using a mixing gas of C 2 F 6 gas and O 2 gas to form vertical walls in the first HDP oxide films and forming a second HDP oxide film on the resulting structure. The characteristics of a device can be improved because diffusion of F ions in a FSG film formed on the first HDP oxide film is minimized.
1. A method for forming an isolation film of a semiconductor device, comprising:
forming a trench in a semiconductor substrate;
forming a first HDP oxide film in the formed trench;
performing an etch-back process using a mixture of C 2 F 6 gas and O 2 gas to prevent diffusion of F ions of an FSG formed on the first HDP oxide film and to form a vertical sidewall in the first HDP oxide film; and
forming a second HDP oxide film on the resulting structure.
2. The method as claimed in claim 1 , comprising performing the etch-back process under process condition wherein a C 2 F 6 gas flow is about 50 sccm to 200 sccm, an O 2 gas flow is about 200 sccm to 500 sccm, a HF power is about 500 W to 1000 W and an LF power is about 3000 W to 4000 W.
3. The method as claimed in claim 1 , further comprising forming a sidewall oxide film on a sidewall of the trench by an oxidization process, after forming the trench.
4. The method as claimed in claim 1 , comprising forming the first HDP oxide film under process conditions wherein an SiH 4 gas flow is about 10 sccm to 100 sccm, an O 2 gas flow is about 10 sccm to 100 sccm, an He gas flow is about 100 sccm to 1000 sccm, an H 2 gas flow is 50 sccm to 1000 sccm, an LF power is about 1000 W to 10000 W, and an HF power is about 500 to 5000 W.
5. The method as claimed in claim 1 , comprising forming the second HDP oxide film using the process conditions as those of the first HDP oxide film.
6. The method as claimed in claim 1 , further comprising performing a polishing process until the semiconductor substrate is exposed, after the second HDP oxide film is formed.
7. A method for forming an isolation film of a semiconductor device, comprising:
forming a trench in a semiconductor substrate;
forming a sidewall oxide film on a sidewall of the trench;
forming a first HDP oxide film in the trench having the sidewall oxide films; performing an etch-back process using a mixture of C 2 F 6 gas and O 2 gas to prevent diffusion of F ions of an FSG film formed on the first HDP oxide film and to form a vertical sidewall in the first HDP oxide film;
forming a second HDP oxide film on the resulting structure; and
performing a polishing process until the semiconductor substrate is exposed.