Method for making an integrated circuit substrate having laser-embedded conductive patterns
View Patent ↗A method for making an integrated circuit substrate having laser-embedded conductive patterns provides a high-density mounting and interconnect structure for integrated circuits. A dielectric material is injection-molded or laminated over a metal layer that is punched or etched. The metal layer can provide one or more power planes within the substrate. A laser is used to ablate channels on the surfaces of the outer dielectric layer for the conductive patterns. The conductive patterns are electroplated or paste screen-printed and an etchant-resistive material is applied. Finally, a plating material can be added to exposed surfaces of the conductive patterns. An integrated circuit die and external terminals can then be attached to the substrate, providing an integrated circuit having a high-density interconnect.
1. A method for manufacturing an integrated circuit substrate for interconnecting a semiconductor die, comprising:
providing a first dielectric layer directly on a metal layer;
laser-ablating the first dielectric layer to form channels on a top side of the first dielectric layer, wherein the first dielectric layer remains between the channels on the top side of the dielectric layer and the metal layer; and
filling the channels with conductive material to form circuits for interconnecting the semiconductor die to a plurality of terminals for interfacing the semiconductor die to external devices.
2. The method of claim 1 , wherein the filling is performed by paste-screening conductive material into the channels.
3. The method of claim 2 , wherein the conductive material is a conductive paste.
4. The method of claim 1 , wherein the filling is performed by plating conductive material into the channels.
5. The method of claim 1 , wherein the providing provides the metal layer having the first dielectric layer bonded to a top side thereof.
6. The method of claim 5 , wherein the providing provides the metal layer having a second dielectric layer bonded to a bottom side thereof.
7. The method of claim 6 , further comprising:
laser-ablating the second dielectric layer to form bottom channels on a bottom side of the second dielectric layer; and
filling the bottom channels with conductive material to form second circuits for interconnecting the semiconductor die to the plurality of terminals.
8. The method of claim 6 , further comprising:
prior to the providing, punching holes in the metal layer to provide for passage of vias from a top side of the substrate to a bottom side of the substrate;
laser-ablating via holes through the first and second dielectric layers; and
filling the via holes with conductive material to form the vias.
9. The method of claim 6 , further comprising:
etching holes in the metal layer to provide for passage of vias from a top side of the substrate to a bottom side of the substrate;
laser-ablating via holes through the first and second dielectric layers; and
filling the via holes with conductive material to form the vias.
10. The method of claim 5 , further comprising:
laser-ablating blind via cavities in the first dielectric layer, the cavities terminating at the metal layer; and
filling the cavities with conductive material to form blind vias.
11. The method of claim 1 , further comprising machining the conductive material to planarize the substrate.
12. The method of claim 1 , further comprising etching the conductive material to planarize the substrate.
13. The method of claim 1 , further comprising plating areas of the conductive material to provide terminals for soldering or bonding.
14. The method of claim 1 , further comprising embossing a recess in the first dielectric layer.
15. The method of claim 14 , further comprising mounting the semiconductor die within the recess.
16. The method of claim 1 , further comprising bonding a second dielectric layer over the top side of the first dielectric layer and the conductive material.
17. The method of claim 16 , further comprising:
laser-ablating the second dielectric layer to form second channels on a top side of the second dielectric layer; and
filling the second channels with conductive material to form second circuits.
18. A method for manufacturing an integrated circuit substrate for interconnecting a semiconductor die, comprising:
providing a substrate form comprising a dielectric layer bonded to a metal layer;
laser-ablating the dielectric layer to form channels on a top side of the dielectric layer, wherein the first dielectric layer remains between the channels on the top side of the dielectric layer and the metal layer; and
filling the channels with conductive material to form circuits for interconnecting the semiconductor die to a plurality of terminals for interfacing the semiconductor die to external devices.
19. The method of claim 18 , wherein the substrate form comprises the metal layer having dielectric material bonded on both sides, wherein the laser-ablating ablates channels on both sides of the substrate form, blind via holes through to the metal layer on at least one side of the substrate form and via holes through the metal layer and dielectric material, and wherein the filling deposits conductive material within the channels, blind via holes and via holes to form the circuits.
20. A method for manufacturing a semiconductor package, comprising:
providing a substrate form comprising a metal layer having dielectric material bonded to both sides thereof;
laser-ablating top and bottom sides of the substrate form to form channels on the top and bottom sides of the substrate form, wherein the dielectric material remains between the channels on the top and bottom sides of the substrate form and the metal layer;
filling the channels with conductive material to form circuits, the circuits including terminal lands on the bottom side of the substrate form;
mounting a semiconductor die to the top side of the substrate form; and
connecting terminals of the semiconductor die to the circuits whereby the semiconductor die is electrically connected to the terminal lands.