Image sensor and method for fabricating the same
View Patent ↗An image sensor and a method for fabricating the same are disclosed, to improve a contact quality between a contact plug and a source diffusion layer. The image sensor includes a photodiode in an active area of a semiconductor substrate, for receiving incident external light and generating optical charges; a transistor having an impurity diffusion layer electrically connected with the photodiode, for transferring/discharging the optical charges generated by the photodiode to a signal processing circuit; an impurity implantation layer having impurity selectively implanted thereto, for selectively covering the impurity diffusion layer; an insulating interlayer above the semiconductor substrate to cover the photodiode, the transistor, and the impurity implantation layer; an open hole penetrating the insulating interlayer, for selectively opening the impurity diffusion layer; and a contact plug for filling the open hole, and electrically connecting the impurity diffusion layer and a metal line provided above the insulating interlayer.
1. A method for fabricating an image sensor comprising:
forming a photodiode and a transistor having an impurity diffusion layer being electrically connected with the photodiode, in an active area of a semiconductor substrate;
forming an impurity implantation layer on the substrate including a portion of the impurity diffusion layer;
selectively implanting impurities only into a portion of the impurity implantation layer covering the portion of the impurity diffusion layer;
forming an insulating interlayer above the semiconductor substrate, the insulating interlayer for covering the photodiode, the transistor, and the impurity implantation layer;
selectively opening the insulating interlayer to expose the impurity implantation layer; and
forming a contact plug for electrically connecting the impurity implantation layer of the opened area with a metal layer provided above the insulation interlayer.
2. The method of claim 1 , wherein the impurity implantation layer is formed by epitaxial growth.